发明授权
US06248250B1 RF plasma reactor with hybrid conductor and multi-radius dome ceiling
失效
射频等离子体反应器与混合导体和多半圆顶天花板
- 专利标题： RF plasma reactor with hybrid conductor and multi-radius dome ceiling
- 专利标题（中）： 射频等离子体反应器与混合导体和多半圆顶天花板
-
申请号： US08897436申请日： 1997-07-21
-
公开(公告)号： US06248250B1公开(公告)日： 2001-06-19
- 发明人: Hiroji Hanawa , Gerald Zheyao Yin , Diana Xiaobing Ma , Philip M. Saizman , Peter K. Loewenhardt , Allen Zhao
- 申请人： Hiroji Hanawa , Gerald Zheyao Yin , Diana Xiaobing Ma , Philip M. Saizman , Peter K. Loewenhardt , Allen Zhao
- 主分类号： H05H146
- IPC分类号： H05H146
摘要：
The present invention adheres to an optimized coil-domed geometry including a particular dome apex height range relative to the dome base and a particular wafer position range relative to the dome apex.
信息查询
