发明授权
- 专利标题： Source metal embedded in an inert material and process thereof
- 专利标题（中）： 嵌入在惰性材料中的源极金属及其工艺
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申请号： US09123928申请日： 1998-07-28
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公开(公告)号： US06254925B1公开(公告)日： 2001-07-03
- 发明人: Govindarajan Natarajan , John U. Knickerbocker , Robert A. Rita
- 申请人： Govindarajan Natarajan , John U. Knickerbocker , Robert A. Rita
- 主分类号： C23C1606
- IPC分类号： C23C1606
摘要：
The present invention discloses at least one source metal that is embedded in at least one inert material to form a stand-alone structure and process thereof. It is preferred that the source metal is nickel or alloy thereof, and the inert material is at least one ceramic.