发明授权
US06257224B1 Process for working a preform made of an oxide single crystal, and a process for producing functional devices
失效
用于制造由氧化物单晶制成的预制件的工艺，以及制造功能元件的工艺
- 专利标题： Process for working a preform made of an oxide single crystal, and a process for producing functional devices
- 专利标题（中）： 用于制造由氧化物单晶制成的预制件的工艺，以及制造功能元件的工艺
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申请号： US09031566申请日： 1998-02-26
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公开(公告)号： US06257224B1公开(公告)日： 2001-07-10
- 发明人: Takashi Yoshino , Kenji Kato , Minoru Imaeda
- 申请人： Takashi Yoshino , Kenji Kato , Minoru Imaeda
- 优先权： JP9-048834 19970304; JP9-220320 19970815
- 主分类号： B28D104
- IPC分类号： B28D104
摘要：
A process for dicing a preform made of an oxide single crystal into cut pieces each having a given shape, includes the steps of removing molecules of the oxide single crystal through dissociation and evaporation with an optochemical reaction under irradiation of a laser beam upon the preform, thereby forming grooves on the preform, and then cleaving the preform along the groove.
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