发明授权
US06268606B1 Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up
失效
静电偏转器，用于电子束曝光设备，具有减小的充电
- 专利标题： Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up
- 专利标题（中）： 静电偏转器，用于电子束曝光设备，具有减小的充电
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申请号： US09337795申请日： 1999-06-22
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公开(公告)号： US06268606B1公开(公告)日： 2001-07-31
- 发明人: Tomohiko Abe , Yoshihisa Ooae , Hiroshi Yasuda
- 申请人： Tomohiko Abe , Yoshihisa Ooae , Hiroshi Yasuda
- 优先权： JP10-180751 19980626
- 主分类号： H01J3700
- IPC分类号： H01J3700
摘要：
An electrostatic deflector of an electron beam exposure apparatus is disclosed. A cylindrical holding member is made of an insulating material. An electrode including a plurality of electrode members fixedly arranged in spaced relationship to each other and having at least a portion of the surface thereof grown with a metal film is disposed inside the holding member. The electrode members each formed with a metal film on the surface thereof are made of a conductive ceramic having a resistivity selected at least in the range of 0.001 &OHgr;•cm to 1000 &OHgr;•cm.
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