发明授权
- 专利标题： Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters
- 专利标题（中）： 组合多色电磁束源系统应用于椭偏仪，分光光度计和偏光仪
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申请号： US09479091申请日： 2000-01-07
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公开(公告)号： US06268917B1公开(公告)日： 2001-07-31
- 发明人: Blaine D. Johs
- 申请人： Blaine D. Johs
- 主分类号： G01J400
- IPC分类号： G01J400
摘要：
Disclosed is a source of polychromatic electromagnetic radiation which, utilizing a beam combiner system, combines beams of polychromatic electromagnetic radiation from a plurality of sources to provide a relatively broad and flattened intensity characteristic vs. wavelength output spectrum, and its application in material system investigation systems, such as ellipsometers, spectrophotometers and polarimeters which comprise a polychromatic source of electromagnetic radiation.
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