发明授权
- 专利标题: High efficiency replicated x-ray optics and fabrication method
- 专利标题(中): 高效复制x射线光学元件及其制造方法
-
申请号: US09359581申请日: 1999-07-22
-
公开(公告)号: US06278764B1公开(公告)日: 2001-08-21
- 发明人: Troy W. Barbee, Jr. , Stephen M. Lane , Donald E. Hoffman
- 申请人: Troy W. Barbee, Jr. , Stephen M. Lane , Donald E. Hoffman
- 主分类号: G21K106
- IPC分类号: G21K106
摘要:
Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.
信息查询