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公开(公告)号：US06278764B1
公开(公告)日：2001-08-21
申请号：US09359581
申请日：1999-07-22
IPC分类号： G21K106
CPC分类号： B82Y10/00 , G03F7/708 , G21K1/06 , G21K1/062 , G21K2201/061 , G21K2201/067
摘要： Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.
摘要翻译： 通过在超级抛光的可重复使用的心轴上溅射沉积反射层来制造复制的x射线光学器件。 反射层通过支撑多层增强，其导致在与心轴分离期间不变形的较强应力消除的反射表面。 支撑多层增强了从芯轴部分复制品而不降低表面粗糙度的能力。 反射表面的平滑度与心轴表面相当。 外层电沉积在支撑层上。 分离层可以在反射表面之前直接沉积在心轴上，以有助于将层状管状光学器件从心轴移除而不变形。 外壳的内反射面可以是单层放射反射镜或共振多层反射镜。 所得到的光学器件可以用于各种各样的应用，包括光刻，显微镜，放射照相，断层摄影和晶体学。
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2.发明授权
公开(公告)号：US5742471A
公开(公告)日：1998-04-21
申请号：US755619
申请日：1996-11-25
CPC分类号： H01G4/20 , H01G4/10 , Y10T29/435
摘要： A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3) in alternating layers to form a nano-laminate.
摘要翻译： 电容器由至少两个金属导体形成，金属导体之间具有多层电介质和相对的电介质 - 导体界面层。 多层电介质包括许多交替层的无定形氧化锆（ZrO 2）和氧化铝（Al 2 O 3）。 电介质 - 导体界面层被设计用于增加电压击穿和延长的使用寿命。 增加局部界面功函数以减少电荷注入，从而增加击穿电压。 适当的材料选择可以防止导体和电介质之间的电化学反应和扩散。 物理气相沉积用于以交替的层沉积氧化锆（ZrO 2）和氧化铝（Al 2 O 3）以形成纳米层压板。
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公开(公告)号：US5486277A
公开(公告)日：1996-01-23
申请号：US384096
申请日：1995-02-06
CPC分类号： H01G4/306 , C23C14/0036 , C23C14/042 , C23C14/185
摘要： A high performance capacitor fabricated from nano-structure multilayer materials, such as by controlled, reactive sputtering, and having very high energy-density, high specific energy and high voltage breakdown. The multilayer capacitors, for example, may be fabricated in a "notepad" configuration composed of 200-300 alternating layers of conductive and dielectric materials so as to have a thickness of 1 mm, width of 200 mm, and length of 300 mm, with terminals at each end of the layers suitable for brazing, thereby guaranteeing low contact resistance and high durability. The "notepad" capacitors may be stacked in single or multiple rows (series-parallel banks) to increase the voltage and energy density.
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4.发明申请Energetic composite and system with enhanced mechanical sensitivity to initiation of self-sustained reaction 有权能量复合材料和系统具有增强的机械敏感性，引发自持反应公开(公告)号：US20100162913A1
公开(公告)日：2010-07-01
申请号：US11804454
申请日：2007-05-18
CPC分类号： C06B45/12 , C06C7/00 , F42C7/12 , F42C19/0803
摘要： An energetic composition and system using amassed energetic multilayer pieces which are formed from the division, such as for example by cutting, scoring, breaking, crushing, shearing, etc., of a mechanically activatable monolithic energetic multilayer(s) (e.g. macro-scale sheets of multilayer films), for enhancing the sensitivity of the energetic composite and system to mechanical initiation of self-sustained reaction. In particular, mechanical initiation of the energetic composition may be achieved with significantly lower mechanical energy inputs than that typically required for initiating the monolithic energetic multilayers from which it is derived.
摘要翻译： 使用积分的能量多层片材的能量组成和系统，其由分割形成，例如通过切割，刻痕，破碎，破碎，剪切等形成机械可激活的整体能量多层（例如，宏观尺度 多层薄膜），用于增强能量复合材料和系统对自持续反应机械起始的敏感性。 特别地，能量组合物的机械引发可以通过显着降低机械能输入而实现，而不是通过引发来自其的整体式能量多层的典型需要。
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5.发明授权Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application 有权具有尖锐，稳定界面的多层膜，用于EUV和软X射线应用公开(公告)号：US06396900B1
公开(公告)日：2002-05-28
申请号：US09847744
申请日：2001-05-01
申请人： Troy W. Barbee, Jr. , Sasa Bajt
发明人： Troy W. Barbee, Jr. , Sasa Bajt
IPC分类号： G21K106
CPC分类号： B82Y10/00 , G02B5/0891 , G21K1/062
摘要： The reflectivity and thermal stability of Mo/Si (molybdenum/silicon) multilayer films, used in soft x-ray and extreme ultraviolet region, is enhanced by deposition of a thin layer of boron carbide (e.g., B4C) between alternating layers of Mo and Si. The invention is useful for reflective coatings for soft X-ray and extreme ultraviolet optics, multilayer for masks, coatings for other wavelengths and multilayers for masks that are more thermally stable than pure Mo/Si multilayers
摘要翻译： 用于软X射线和极紫外区域的Mo / Si（钼/硅）多层薄膜的反射率和热稳定性通过在Mo交替层之间沉积碳化硼薄层（例如，B4C）而得到增强， Si。 本发明对于用于软X射线和极紫外光学器件的反射涂层，用于掩模的多层膜，用于其它波长的涂层以及对于比纯Mo / Si多层膜更热稳定的掩模的多层膜是有用的
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6.发明授权
公开(公告)号：US5731538A
公开(公告)日：1998-03-24
申请号：US816952
申请日：1997-02-19
申请人： Dennis W. O'Brien , Robert L. Druce , Gary W. Johnson , George E. Vogtlin , Troy W. Barbee, Jr. , Ronald S. Lee
发明人： Dennis W. O'Brien , Robert L. Druce , Gary W. Johnson , George E. Vogtlin , Troy W. Barbee, Jr. , Ronald S. Lee
CPC分类号： F42B3/13
摘要： A slapper detonator comprises a solid-state high-voltage capacitor, a low-jitter dielectric breakdown switch and trigger circuitry, a detonator transmission line, an exploding foil bridge, and a flier material. All these components are fabricated in a single solid-state device using thin film deposition techniques.
摘要翻译： 撞击式雷管包括固态高压电容器，低抖动介质击穿开关和触发电路，雷管传输线，爆炸箔桥和飞翼材料。 所有这些组件都使用薄膜沉积技术在单个固态器件中制造。
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7.发明授权Method for fabricating an ignitable heterogeneous stratified metal structure 失效用于制造可点燃的非均质分层金属结构的方法
公开(公告)号：US5547715A
公开(公告)日：1996-08-20
申请号：US542976
申请日：1995-10-13
申请人： Troy W. Barbee, Jr. , Timothy Weihs
发明人： Troy W. Barbee, Jr. , Timothy Weihs
CPC分类号： C06B45/14 , C06C9/00 , C23C14/14 , C23C14/34 , Y10S428/93 , Y10T428/12493 , Y10T428/125 , Y10T428/12812 , Y10T428/12986 , Y10T428/24967 , Y10T428/31536
摘要： A multilayer structure has a selectable, (i) propagating reaction front velocity V, (ii) reaction initiation temperature attained by application of external energy and (iii) amount of energy delivered by a reaction of alternating unreacted layers of the multilayer structure. Because V is selectable and controllable, a variety of different applications for the multilayer structures are possible, including but not limited to their use as ignitors, in joining applications, in fabrication of new materials, as smart materials and in medical applications and devices. The multilayer structure has a period D, and an energy release rate constant K. Two or more alternating unreacted layers are made of different materials and separated by reacted zones. The period D is equal to a sum of the widths of each single alternating reaction layer of a particular material, and also includes a sum of reacted zone widths, t.sub.i, in the period D. The multilayer structure has a selectable propagating reaction front velocity V, whereV=K(1/D.sup.n).times.[1-(t.sub.i /D)]and n is about 0.8 to 1.2.
摘要翻译： 多层结构具有可选择的（i）传播的反应前速度V，（ii）通过施加外部能量获得的反应起始温度和（iii）通过多层结构的交替的未反应层的反应而传递的能量的量。 由于V是可选择和可控的，所以多层结构的各种不同应用是可能的，包括但不限于它们作为点火器的用途，在接合应用中，新材料的制造，智能材料以及医疗应用和设备中的应用。 多层结构具有周期D和能量释放速度常数K.两个或更多个交替的未反应层由不同的材料制成并通过反应区分离。 周期D等于特定材料的每个单个交替反应层的宽度的总和，并且还包括周期D中反应的区域宽度ti的总和。多层结构具有可选择的传播反应前沿速度V ，其中V = K（1 / Dn）x [1-（ti / D）]，n为约0.8至1.2。
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公开(公告)号：US08328967B2
公开(公告)日：2012-12-11
申请号：US13100154
申请日：2011-05-03
CPC分类号： C06C9/00 , C06B33/00 , C06B45/14 , Y10T156/10
摘要： Sol-gel chemistry is used to prepare igniters comprising energetic multilayer structures coated with energetic materials. These igniters can be tailored to be stable to environmental aging, i.e., where the igniters are exposed to extremes of both hot and cold temperatures (−30 C to 150 C) and both low (0%) and high relative humidity (100%).
摘要翻译： 溶胶 - 凝胶化学用于制备包含高能材料的能量多层结构的点火器。 这些点火器可以被定制为对环境老化是稳定的，即点火器暴露于热和冷温度（-30℃至150℃）以及低（0％）和高相对湿度（100％）的极限的地方。 。
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9.发明授权Energetic composite and system with enhanced mechanical sensitivity to initiation of self-sustained reaction 有权能量复合材料和系统具有增强的机械敏感性，引发自持反应公开(公告)号：US08187398B2
公开(公告)日：2012-05-29
申请号：US11804454
申请日：2007-05-18
CPC分类号： C06B45/12 , C06C7/00 , F42C7/12 , F42C19/0803
摘要： An energetic composition and system using amassed energetic multilayer pieces which are formed from the division, such as for example by cutting, scoring, breaking, crushing, shearing, etc., of a mechanically activatable monolithic energetic multilayer(s) (e.g. macro-scale sheets of multilayer films), for enhancing the sensitivity of the energetic composite and system to mechanical initiation of self-sustained reaction. In particular, mechanical initiation of the energetic composition may be achieved with significantly lower mechanical energy inputs than that typically required for initiating the monolithic energetic multilayers from which it is derived.
摘要翻译： 使用积分的能量多层片材的能量组成和系统，其由分割形成，例如通过切割，刻痕，破碎，破碎，剪切等形成机械可激活的整体能量多层（例如，宏观尺度 多层薄膜），用于增强能量复合材料和系统对自持续反应机械起始的敏感性。 特别地，能量组合物的机械引发可以通过显着降低机械能输入而实现，而不是通过引发来自其的整体式能量多层的典型需要。
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公开(公告)号：US07951247B2
公开(公告)日：2011-05-31
申请号：US10261879
申请日：2002-09-30
IPC分类号： C06B23/00
CPC分类号： C06C9/00 , C06B33/00 , C06B45/14 , Y10T156/10
摘要： Sol-gel chemistry is used to prepare igniters comprising energetic multilayer structures coated with energetic booster materials. These igniters can be tailored to be stable to environmental aging, i.e., where the igniters are exposed to extremes of both hot and cold temperatures (−30 C to 150 C) and both low (0%) and high relative humidity (100%).
摘要翻译： 溶胶 - 凝胶化学用于制备包含高能增强材料的能量多层结构的点火器。 这些点火器可以被定制为对环境老化是稳定的，即点火器暴露于热和冷温度（-30℃至150℃）以及低（0％）和高相对湿度（100％）的极限的地方。 。
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