发明授权
- 专利标题: Light modulator and method of manufacturing the light modulator
- 专利标题(中): 光调制器和制造光调制器的方法
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申请号: US09245838申请日: 1999-02-08
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公开(公告)号: US06282009B1公开(公告)日: 2001-08-28
- 发明人: Hitoshi Tada , Tomoko Kadowaki
- 申请人: Hitoshi Tada , Tomoko Kadowaki
- 优先权: JP10-224241 19980807
- 主分类号: G02F103
- IPC分类号: G02F103
摘要:
A light modulator having a reduced parasitic static capacitance includes a semiconductor substrate having a mesa section and a bonding pad section. A primary insulating film on the substrate continuously covers the mesa section and the bonding pad section. After a mask has been formed on a portion of the primary insulating film opposite the bonding pad section, the remaining portion of the primary insulating film is etched, followed by removal of the mask. After the removal of the mask, a second insulating film is formed continuously covering the primary insulating film opposite the bonding pad section and the mesa section so that a relatively thick insulating layer is present only opposite the bonding pad section.
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