发明授权
- 专利标题: Image formation method with photosensitive material
- 专利标题(中): 图像形成方法与感光材料
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申请号: US09038683申请日: 1998-03-09
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公开(公告)号: US06291145B1公开(公告)日: 2001-09-18
- 发明人: Tadayosi Kokubo , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya , Soichi Owa
- 申请人: Tadayosi Kokubo , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya , Soichi Owa
- 优先权: JP9-053582 19970307
- 主分类号: G03F524
- IPC分类号: G03F524
摘要:
Image-formation methods and photosensitive materials used in such methods are disclosed that form very high-resolution patterns. The photosensitive materials comprise an ingredient that is triggered by a radical to undergo a latent-image-forming reaction. The radicals are produced by photons from an illumination light. Alternatively, the ingredient is triggered by a reactive-intermediate compound that is activated by the exposure-produced radical. The photosensitive materials possess a non-linear sensitivity characteristic in which the latent-image reaction density increases according to the mth power (m>1) of the incident light intensity. The photosensitive material can be applied to a sensitive substrate for exposure. Multiple exposures of the sensitive substrate are performed using a projected mask pattern in the presence of a radical deactivator. The multiple exposures can be performed while: (a) changing the exposure intensity distribution on the photosensitive material, or (b) shifting the projected mask pattern and the sensitive substrate relative to each other by a specified amount, or (c) using a different projected mask pattern for each exposure.
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