发明授权
US06296894B1 Evaporation source, apparatus and method for the preparation of organic El device
失效
蒸发源，用于制备有机El装置的装置和方法
- 专利标题： Evaporation source, apparatus and method for the preparation of organic El device
- 专利标题（中）： 蒸发源，用于制备有机El装置的装置和方法
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申请号： US09372141申请日： 1999-08-11
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公开(公告)号： US06296894B1公开(公告)日： 2001-10-02
- 发明人: Hiroshi Tanabe , Satoshi Tokura , Kengo Fukuyu , Akihiro Horita , Masaaki Koishi , Toru Sasaki
- 申请人： Hiroshi Tanabe , Satoshi Tokura , Kengo Fukuyu , Akihiro Horita , Masaaki Koishi , Toru Sasaki
- 优先权： JP10-256058 19980826
- 主分类号： C23C1600
- IPC分类号： C23C1600
摘要：
An evaporation source includes an insulating container adapted to receive a volume of source material therein and a heater closely disposed around the container for heating and evaporating the source material into a vapor. The effective contact area of the container in contact with the source material is correlated to the volume of source material. The evaporation source is useful in the preparation of organic EL devices.
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