公开(公告)号：US06296894B1

公开(公告)日：2001-10-02

申请号：US09372141

申请日：1999-08-11

申请人： Hiroshi Tanabe ,  Satoshi Tokura ,  Kengo Fukuyu ,  Akihiro Horita ,  Masaaki Koishi ,  Toru Sasaki

发明人： Hiroshi Tanabe ,  Satoshi Tokura ,  Kengo Fukuyu ,  Akihiro Horita ,  Masaaki Koishi ,  Toru Sasaki

IPC分类号： C23C1600

CPC分类号： C23C14/542 ,  C23C14/243 ,  H01L51/5012 ,  H05B33/10

摘要： An evaporation source includes an insulating container adapted to receive a volume of source material therein and a heater closely disposed around the container for heating and evaporating the source material into a vapor. The effective contact area of the container in contact with the source material is correlated to the volume of source material. The evaporation source is useful in the preparation of organic EL devices.

摘要翻译： 蒸发源包括适于在其中容纳一定体积的源材料的绝热容器和紧密设置在容器周围的加热器，用于加热和蒸发源材料成蒸气。 与源材料接触的容器的有效接触面积与源材料的体积相关。 蒸发源可用于制备有机EL器件。

公开(公告)号：US6132280A

公开(公告)日：2000-10-17

申请号：US427763

申请日：1999-10-27

申请人： Hiroshi Tanabe ,  Hiroshi Yamamoto ,  Kengo Fukuyu ,  Osamu Onitsuka

发明人： Hiroshi Tanabe ,  Hiroshi Yamamoto ,  Kengo Fukuyu ,  Osamu Onitsuka

IPC分类号： H01L21/00 ,  H01L21/677 ,  H01L51/40 ,  H01L51/50 ,  H01L51/52 ,  H01L51/56 ,  H05B33/10 ,  H05B33/12 ,  H05B33/14

CPC分类号： H05B33/10 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67772 ,  H01L51/0008 ,  H01L51/5237 ,  H01L51/56

摘要： The invention provides an organic EL display device fabrication system comprising a loading side normal-pressure delivery chamber 11 including a first substrate delivery means 61 for delivering a substrate with no film formed thereon, and a loading chamber 21 connected thereto for introducing the substrate from loading side normal-pressure delivery chamber 11 at normal pressure into a vacuum delivery chamber 31 at a vacuum. The vacuum delivery chamber 31 is connected to loading chamber 21 and includes a second substrate delivery means 62 for delivering the substrate in a vacuum, and has one or two or more film formation chambers 32 to 35 connected thereto. The system further comprises an unloading chamber 41 connected thereto for delivering the substrate out of vacuum delivery chamber 31 at a vacuum into an unloading side normal-pressure delivery chamber 51 at normal pressure. The unloading side normal-pressure delivery chamber 51 is connected to unloading chamber 41 and includes a third substrate delivery means 63 for delivering a substrate with films formed thereon. An inert gas atmosphere having a moisture content of up to 100 ppm is maintained in both unloading chamber 41 and unloading side normal-pressure delivery chamber 51 at normal pressure. The invention also provides an organic EL display device fabrication process using this fabrication system.

摘要翻译： 本发明提供了一种有机EL显示装置制造系统，其包括装载侧常压输送室11，该装载侧常压输送室11包括用于输送基板而不形成膜的第一基板输送装置61和与其连接的装载室21， 侧正压输送室11在真空下进入真空输送室31。 真空输送室31连接到加载室21，并且包括用于在真空中输送基板的第二基板输送装置62，并且具有连接到其上的一个或两个或更多个成膜室32至35。 该系统还包括与其连接的卸载室41，用于将真空输送室31在真空下输送到常压下的卸载侧常压输送室51中。 卸载侧常压输送室51连接到卸载室41，并且包括第三基板输送装置63，用于在其上形成有膜的输送基板。 在常压下，卸载室41和卸载侧常压输送室51都保持水分含量高达100ppm的惰性气体气氛。 本发明还提供了一种使用该制造系统的有机EL显示装置制造工艺。