发明授权
- 专利标题: Method and apparatus for removing processing liquid from a processing liquid delivery line
- 专利标题(中): 从处理液体输送管线去除处理液体的方法和装置
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申请号: US09252717申请日: 1999-02-19
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公开(公告)号: US06305392B1公开(公告)日: 2001-10-23
- 发明人: Anish Tolia , Tushar Mandrekar , Michael Jackson
- 申请人: Anish Tolia , Tushar Mandrekar , Michael Jackson
- 主分类号: B08B9027
- IPC分类号: B08B9027
摘要:
A method and apparatus for desorbing processing liquid from a processing liquid delivery line is provided. Non-thermal energy, such as ultrasonic energy or electromagnetic energy, is applied to a processing liquid delivery line. The non-thermal energy may be applied directly to the processing liquid delivery line, or may be applied indirectly via a conducting medium which distributes the energy along the length of the processing liquid delivery line. When non-thermal energy in the form of electromagnetic energy is employed, the frequency of the electromagnetic energy is adjusted to match the vibrational frequency of the absorbed molecules of processing liquid.
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