Apparatus And Methods For Controlling The Composition Of Fluids In A Fluid Stream
    3.
    发明申请
    Apparatus And Methods For Controlling The Composition Of Fluids In A Fluid Stream 审中-公开
    用于控制流体流中流体的组成的装置和方法

    公开(公告)号:US20130148461A1

    公开(公告)日:2013-06-13

    申请号:US13521313

    申请日:2011-01-10

    IPC分类号: B01F15/04

    摘要: Embodiments of the present invention are directed to a devices and methods for forming a desired miture of two or more fluids in a conduit. The devices and methods feature control means having error monitoring means and in response to an error event the control means organizes the packet-group of command signals to form at least one first error packet group. The error event occurs during the period of time in which the at least one error packet-group is received by a selectable value. The at least one error packet-group comprising an order or timing of first command signals and second commands signals to minimize deviation from the desired mixture in the flow of mixture-packets forming the desired mixture of two or more fluids in a conduit during the error event.

    摘要翻译: 本发明的实施例涉及一种用于在管道中形成两种或更多种流体的所需要的装置和方法。 所述设备和方法具有控制装置,其具有错误监视装置,并且响应于错误事件,控制装置组织命令信号的分组组以形成至少一个第一错误分组组。 在通过可选择的值接收至少一个错误分组组的时间段期间发生错误事件。 所述至少一个错误分组组包括第一命令信号和第二命令信号的顺序或定时,以最小化在错误期间在导管中形成两个或更多个流体的期望混合物的混合物包流中的期望混合物的偏差 事件。

    Apparatuses and methods for atomic layer deposition
    4.
    发明授权
    Apparatuses and methods for atomic layer deposition 有权
    用于原子层沉积的装置和方法

    公开(公告)号:US08291857B2

    公开(公告)日:2012-10-23

    申请号:US12494901

    申请日:2009-06-30

    摘要: Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.

    摘要翻译: 本发明的实施例提供了诸如等离子体增强型ALD(PE-ALD)的原子层沉积(ALD)的装置和方法。 在一些实施例中,提供了一种PE-ALD室,其包括与其中具有基板支撑件的室主体耦合的室盖组件。 在一个实施例中,室盖组件具有入口歧管组件,其包含围绕集中通道的环形通道,其中集中通道延伸穿过入口歧管组件,并且入口歧管组件还包含从环形通道延伸的注入孔, 集中通道侧壁,集中通道。 腔室盖组件还包括设置在入口歧管组件下方的喷头组件,设置在入口歧管组件和喷头组件之间的水箱,以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统(RPS) 与集中通道的流体通信。

    EXERCISE DEVICE
    6.
    发明申请
    EXERCISE DEVICE 审中-公开
    锻炼装置

    公开(公告)号:US20110263397A1

    公开(公告)日:2011-10-27

    申请号:US13093554

    申请日:2011-04-25

    申请人: Michael Jackson

    发明人: Michael Jackson

    IPC分类号: A63B26/00

    CPC分类号: A63B23/0458

    摘要: An exercise device comprises a base having a generally planar top. The base is supported at a first height above a support surface by downwardly extending supports, or may be raised to a second height by one or more extendable feet. The exercise device may include an exercise tower rotatably mounted to the base and movable between a stored position under the base and a raised position in which it extends above the base. The base and tower may define one more exercise accessory attachment points or mounts and such accessories may be stored in a storage area associated with the tower.

    摘要翻译: 运动装置包括具有大致平坦的顶部的底座。 底座通过向下延伸的支撑件支撑在支撑表面上方的第一高度处,或者可以通过一个或多个可伸展的脚部升高到第二高度。 运动装置可以包括可旋转地安装到基座并可在基座下方的存储位置和其在基座上方延伸的升高位置之间运动的运动塔。 基座和塔架可以定义一个以上的运动附件附接点或安装座,并且这些附件可以存储在与塔相关联的存储区域中。

    SAMPLE POSITIONING APPARATUS
    9.
    发明申请
    SAMPLE POSITIONING APPARATUS 审中-公开
    样品定位装置

    公开(公告)号:US20090310215A1

    公开(公告)日:2009-12-17

    申请号:US12448679

    申请日:2008-01-11

    IPC分类号: G02B21/26

    CPC分类号: G02B21/26

    摘要: A sample positioning stage for positioning a sample to be inspected relative to an optical inspection device, including a first generally planar body on which a sample can be carried and a second body directly coupled to the first body via at least one rigid bearing and at least one resiliently compliant bearing provided between the first and second bodies. The first and second bodies are preloaded against each other in a dimension substantially parallel to the plane of the first generally planar body via the bearings. The stage also includes a motorized drive system operable to drive the first and second bodies relative to each other in the first plane toward a demanded relative position received from a position input device, and a position sensing device on at least one of the first and second bodies, for providing a measure of the relative position of the first and second bodies.

    摘要翻译: 一种用于定位相对于光学检查装置进行检查的样品的样品定位台,所述样品定位台包括可以承载样品的第一大致平面的主体和经由至少一个刚性轴承直接联接到第一体的第二体,并且至少 一个弹性柔顺轴承设置在第一和第二主体之间。 第一和第二主体经由轴承以基本上平行于第一大体平坦的主体的平面的尺寸彼此预加载。 舞台还包括电动驱动系统,其可操作以在第一平面中相对于彼此驱动第一和第二主体朝向从位置输入装置接收的所要求的相对位置,以及位置感测装置,其位于第一和第二 用于提供第一和第二物体的相对位置的量度。