发明授权
- 专利标题: Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials
- 专利标题(中): 包括具有还原和氧化电位的亲核胺化合物的清洁溶液
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申请号: US09603693申请日: 2000-06-26
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公开(公告)号: US06319885B1公开(公告)日: 2001-11-20
- 发明人: Wai Mun Lee , Charles U. Pittman, Jr. , Robert J. Small
- 申请人: Wai Mun Lee , Charles U. Pittman, Jr. , Robert J. Small
- 主分类号: C11D162
- IPC分类号: C11D162
摘要:
A composition for removing resists and etching residue from substrates containing at least one nucleophilic amine compound having oxidation and reduction potentials, at least one organic solvent, water and, optionally, a chelating agent is described. The chelating agent is preferred to be included since it provides added stability and activity to the cleaning composition so that the composition has long term effectiveness. If a chelating agent is not present, the composition, while providing for adequate stripping and cleaning upon initial use of the composition following mixing, has only short term stability. In this latter instance, the nucleophilic amine compound and organic solvent components of the composition preferably are maintained separate from each other until it is desired to use the composition. Thereafter, the components are combined. Following use of the composition, the non-used portion of the composition can be disposed of or be reactivated by the addition of a chelating agent.
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