发明授权
- 专利标题: Washing apparatus and washing method
- 专利标题(中): 洗衣机和洗涤方法
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申请号: US09214240申请日: 1999-05-17
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公开(公告)号: US06325081B1公开(公告)日: 2001-12-04
- 发明人: Nobuhiro Miki , Takahisa Nitta , Yasuyuki Harada , Tadahiro Ohmi
- 申请人: Nobuhiro Miki , Takahisa Nitta , Yasuyuki Harada , Tadahiro Ohmi
- 优先权: JP8-174005 19960703; JP8-211557 19960809
- 主分类号: B08B302
- IPC分类号: B08B302
摘要:
A washing apparatus and a washing method, which further improve a washing effect and enable highly clean washing with a small amount of chemical. Also, it is an object of the invention to provide a washing apparatus of high throughput involving rapid switching of various chemicals of high responsibility and capable of performing a series of washing operations at high speed. The washing apparatus comprises undiluted cleaning liquid injection means for injecting an undiluted solution or undiluted gas of a cleaning liquid into a ultrapure water channel to make a cleaning liquid of a desired concentration, cleaning liquid supplying means connected to the super demineralized water channel for simultaneously supplying front and rear surface of a substrate with a cleaning liquid adjusted to a desired concentration or a ultrapure water, means for superposing ultrasonic wave or high frequency sound waves of 0.5 MHz or more on the substrate through the cleaning liquid, and means for rotating the substrate or means for moving either of the substrate and the cleaning liquid supplying means in one direction, whereby injection of the undiluted solution or undiluted gas into the ultrapure water channel is controlled to continuously perform washing of the substrate by the cleaning liquid and washing by the ultrapure water.