发明授权
- 专利标题: Polishing composition and method for producing a memory hard disk
- 专利标题(中): 抛光组合物及其制造方法
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申请号: US09544287申请日: 2000-04-06
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公开(公告)号: US06332831B1公开(公告)日: 2001-12-25
- 发明人: David M. Shemo , W. S. Rader , Toshiki Owaki
- 申请人: David M. Shemo , W. S. Rader , Toshiki Owaki
- 主分类号: B24B100
- IPC分类号: B24B100
摘要:
A polishing composition for a memory hard disk, which comprises at least the following components (a) to (d): (a) from 0.1 to 50 wt %, based on the total amount of the polishing composition, of at least one abrasive selected from the group consisting of silicon dioxide, aluminum oxide, cerium oxide, zirconium oxide, titanium oxide, silicon nitride and manganese dioxide, (b) from 0.001 to 10 wt %, based on the total amount of the polishing composition, of at least one periodate selected from the group consisting of periodic acid, potassium periodate, sodium periodate and lithium periodate, (c) a buffer component to adjust the pH of the polishing composition to a range of from 2 to 5, and (d) water.
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