发明授权
- 专利标题: Rotary machining apparatus
- 专利标题(中): 旋转加工机
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申请号: US09574285申请日: 2000-05-19
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公开(公告)号: US06336842B1公开(公告)日: 2002-01-08
- 发明人: Shigeo Ootsuki , Shigeo Moriyama , Takashi Kugaya , Kenichi Togawa , Makoto Kajiwara , Shyuichi Oowada , Yukio Suzuki , Yoko Sugawa
- 申请人: Shigeo Ootsuki , Shigeo Moriyama , Takashi Kugaya , Kenichi Togawa , Makoto Kajiwara , Shyuichi Oowada , Yukio Suzuki , Yoko Sugawa
- 优先权: JP11-141137 19990521
- 主分类号: B24B4900
- IPC分类号: B24B4900
摘要:
An object of the present invention is to provide a polishing apparatus which is capable of configuring a surface of a polishing tool without damaging the polishing tool. In order to solve the above-mentioned problem, the present invention provide a rotary machining apparatus comprising a polishing tool for polishing a sample; a rotary disk for holding the polishing tool; a tool for configuring a surface of the polishing tool; and a position adjusting mechanism for adjusting a gap between the tool and the polishing tool, which comprises a rotating mechanism for rotating the tool; and a sensor for sensing a change in the rotation of the rotating mechanism, a height at starting to configure the polishing tool using the tool being determined based on the change in the rotation obtained by the sensor.
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