发明授权
US06342734B1 Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same
有权
互连集成金属 - 绝缘体 - 金属电容器及其制造方法
- 专利标题: Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same
- 专利标题(中): 互连集成金属 - 绝缘体 - 金属电容器及其制造方法
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申请号: US09559934申请日: 2000-04-27
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公开(公告)号: US06342734B1公开(公告)日: 2002-01-29
- 发明人: Derryl D. J. Allman , John Q. Walker , Verne C. Hornback , Todd A. Randazzo
- 申请人: Derryl D. J. Allman , John Q. Walker , Verne C. Hornback , Todd A. Randazzo
- 主分类号: H01L2348
- IPC分类号: H01L2348
摘要:
A metal-insulator-metal capacitor is formed between interconnect layers of an integrated circuit with one of the plates of the capacitor formed integrally with one of the interconnect layers. A dielectric layer is formed on top of the interconnect layer, and a top capacitor plate is formed thereon. A bottom plate is defined by the interconnect layer and extends laterally beyond the top plate so that via interconnects may connect to both plates. An intermetal dielectric (IMD) layer separates the interconnect layer and the capacitor from the next interconnect layer above, and the via interconnects are formed through the IMD layer to connect the above interconnect layer to the capacitor plates. The dielectric layer on top of the interconnect layer that defines the bottom plate and another dielectric layer formed on top of the top plate may serve as etch stops for forming the vias for the via interconnects to different levels.
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