发明授权
US06352580B1 Complexes having tris(pyrazolyl)borate ligands for forming films
失效
具有形成膜的三(吡唑基)硼酸盐配体的配合物
- 专利标题: Complexes having tris(pyrazolyl)borate ligands for forming films
- 专利标题(中): 具有形成膜的三(吡唑基)硼酸盐配体的配合物
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申请号: US09631498申请日: 2000-08-03
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公开(公告)号: US06352580B1公开(公告)日: 2002-03-05
- 发明人: Stefan Uhlenbrock , Brian A. Vaartstra
- 申请人: Stefan Uhlenbrock , Brian A. Vaartstra
- 主分类号: C23C1606
- IPC分类号: C23C1606
摘要:
Methods of forming a film on a substrate using chemical vapor deposition techniques and pyrazolyl complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures.