发明授权
US06368665B1 Apparatus and process for controlled atmosphere chemical vapor deposition
失效
用于控制气氛化学气相沉积的装置和方法
- 专利标题: Apparatus and process for controlled atmosphere chemical vapor deposition
- 专利标题(中): 用于控制气氛化学气相沉积的装置和方法
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申请号: US09067975申请日: 1998-04-29
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公开(公告)号: US06368665B1公开(公告)日: 2002-04-09
- 发明人: Andrew T. Hunt , Subramaniam Shanmugham , William D. Danielson , Henry A. Luten , Tzyy Jiuan Hwang , Girish Deshpande
- 申请人: Andrew T. Hunt , Subramaniam Shanmugham , William D. Danielson , Henry A. Luten , Tzyy Jiuan Hwang , Girish Deshpande
- 主分类号: C23C1600
- IPC分类号: C23C1600
摘要:
An improved chemical vapor deposition apparatus and procedure is disclosed. The technique provides improved shielding of the reaction and deposition zones involved in providing CVD coatings, whereby coatings can be produced, at atmospheric pressure, of materials which are sensitive to components in the atmosphere on substrates which are sensitive to high temperatures and which are too large, or inconvenient, to process in vacuum or similar chambers. The improved technique can be used with various energy sources and is particularly compatible with Combustion Chemical Vapor Deposition (CCVD) techniques.
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