Invention Grant
- Patent Title: Light modulator
- Patent Title (中): 光调制器
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Application No.: US09839120Application Date: 2001-04-23
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Publication No.: US06384955B2Publication Date: 2002-05-07
- Inventor: Hitoshi Tada , Tomoko Kadowaki
- Applicant: Hitoshi Tada , Tomoko Kadowaki
- Priority: JP10-224241 19980807
- Main IPC: G02F103
- IPC: G02F103

Abstract:
A light modulator includes a semiconductor substrate having a main surface, a rear surface, and a grounding conductor on the rear surface. A wave guide section having a width is located on the semiconductor substrate. A bonding pad section on the semiconductor substrate is located adjacent to the wave guide section and an insulating layer covers the main surface of the semiconductor substrate. A portion of the insulating layer immediately opposite the bonding pad section includes a multiple layer structure of insulating films. An electrode opposite the bonding pad section is electrically connected to the wave guide section.
Public/Granted literature
- US20010022681A1 Light Modulator Public/Granted day:2001-09-20
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