发明授权
US06388198B1 Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality 失效
SOI半导体内同轴布线,PCB到系统高速运行和信号质量

Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality
摘要:
An integrated circuit that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.
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