公开(公告)号：US06943452B2

公开(公告)日：2005-09-13

申请号：US10103297

申请日：2002-03-21

申请人： Claude Louis Bertin ,  Gordon Arthur Kelley ,  Dennis Arthur Schmidt ,  William Robert Tonti ,  Jerzy Maria Zalesinski

发明人： Claude Louis Bertin ,  Gordon Arthur Kelley ,  Dennis Arthur Schmidt ,  William Robert Tonti ,  Jerzy Maria Zalesinski

IPC分类号： H01L21/768 ,  H01L21/84 ,  H01L23/66 ,  H05K1/02 ,  H05K3/34 ,  H05K3/46 ,  H01L23/12 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H05K1/0221 ,  H01L21/84 ,  H01L23/66 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2223/6627 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/1903 ,  H01L2924/3011 ,  H05K3/3436 ,  H05K3/3447 ,  H05K3/4644 ,  H05K2201/09509 ,  H05K2201/09518 ,  H05K2201/09809 ,  H05K2201/09981 ,  H05K2201/10356 ,  H05K2201/10674 ,  H05K2203/061 ,  H01L2924/00

摘要： An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.

摘要翻译： 提供一种集成电路，其包含至少部分地形成在含硅衬底内的同轴信号线。 同轴信号线包括内部导体，其具有沿着所述长度的外部导体的长度，所述长度被轴向包围并绝缘。 本文还公开了一种制备具有至少部分地形成在含硅衬底内的所述同轴信号线的集成电路的方法。

公开(公告)号：US06388198B1

公开(公告)日：2002-05-14

申请号：US09265098

申请日：1999-03-09

申请人： Claude Louis Bertin ,  Gordon Arthur Kelley ,  Dennis Arthur Schmidt ,  William Robert Tonti ,  Jerzy Maria Zalesinski

发明人： Claude Louis Bertin ,  Gordon Arthur Kelley ,  Dennis Arthur Schmidt ,  William Robert Tonti ,  Jerzy Maria Zalesinski

IPC分类号： H05K109

CPC分类号： H05K1/0221 ,  H01L21/84 ,  H01L23/66 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2223/6627 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/1903 ,  H01L2924/3011 ,  H05K3/3436 ,  H05K3/3447 ,  H05K3/4644 ,  H05K2201/09509 ,  H05K2201/09518 ,  H05K2201/09809 ,  H05K2201/09981 ,  H05K2201/10356 ,  H05K2201/10674 ,  H05K2203/061 ,  H01L2924/00

摘要： An integrated circuit that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.

摘要翻译： 一种集成电路，其包含至少部分地形成在含硅衬底内的同轴信号线。 同轴信号线包括内导体，其具有沿着所述长度的外导体沿轴向包围并绝缘的长度。 本文还公开了一种制备具有至少部分地形成在含硅衬底内的所述同轴信号线的集成电路的方法。