发明授权
- 专利标题: Fluid control valve and fluid supply/exhaust system
- 专利标题(中): 流体控制阀和流体供应/排气系统
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申请号: US09627784申请日: 2000-07-27
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公开(公告)号: US06394415B1公开(公告)日: 2002-05-28
- 发明人: Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
- 申请人: Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
- 优先权: JP8/334866 19961201; JP8/321276 19961202; JP8/323995 19961204
- 主分类号: F16K3102
- IPC分类号: F16K3102
摘要:
A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
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