发明授权
- 专利标题: Method for producing a micromembrane pump body
- 专利标题(中): 微膜泵体的制造方法
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申请号: US09381222申请日: 1999-09-15
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公开(公告)号: US06395638B1公开(公告)日: 2002-05-28
- 发明人: Reinhard Linnemann , Martin Richter , Stefan Kluge , Peter Woias
- 申请人: Reinhard Linnemann , Martin Richter , Stefan Kluge , Peter Woias
- 优先权: DE19719861 19970512
- 主分类号: H01L21302
- IPC分类号: H01L21302
摘要:
A method of producing a pump body having an inlet opening provided with an inlet valve (106) and an outlet opening provided with an outlet valve (108), said method comprising as a first step the step of structuring a respective first main surface of a first and of a second semiconductor disc (200) for defining a valve flap structure (202) of the inlet valve and a valve seat structure (204) of the outlet valve in the first disc and a valve flap structure of the outlet valve and a valve seat structure of the inlet valve in the second disc. Following this, a valve flap well structure (206; 216) and a valve opening well structure (208; 218) are formed in a predetermined relationship with the valve flap structures and the valve seat structures in a respective second main surface of the first and of the second semiconductor disc. The first main surfaces of said first and second semiconductor discs are connected in such a way that the respective valve flap structure is arranged in a predetermined relationship with a respective valve seat structure. Finally, the respective second main surface of said first and of said second semiconductor disc is etched at least in the area of the valve flap well structure and of the valve opening well structure so as to expose the valve flaps and open the valve seats.
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