公开(公告)号：US06395638B1

公开(公告)日：2002-05-28

申请号：US09381222

申请日：1999-09-15

申请人： Reinhard Linnemann ,  Martin Richter ,  Stefan Kluge ,  Peter Woias

发明人： Reinhard Linnemann ,  Martin Richter ,  Stefan Kluge ,  Peter Woias

IPC分类号： H01L21302

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094

摘要： A method of producing a pump body having an inlet opening provided with an inlet valve (106) and an outlet opening provided with an outlet valve (108), said method comprising as a first step the step of structuring a respective first main surface of a first and of a second semiconductor disc (200) for defining a valve flap structure (202) of the inlet valve and a valve seat structure (204) of the outlet valve in the first disc and a valve flap structure of the outlet valve and a valve seat structure of the inlet valve in the second disc. Following this, a valve flap well structure (206; 216) and a valve opening well structure (208; 218) are formed in a predetermined relationship with the valve flap structures and the valve seat structures in a respective second main surface of the first and of the second semiconductor disc. The first main surfaces of said first and second semiconductor discs are connected in such a way that the respective valve flap structure is arranged in a predetermined relationship with a respective valve seat structure. Finally, the respective second main surface of said first and of said second semiconductor disc is etched at least in the area of the valve flap well structure and of the valve opening well structure so as to expose the valve flaps and open the valve seats.

摘要翻译： 一种制造具有设置有入口阀（106）和具有出口阀（108）的出口开口的入口的泵体的方法，所述方法包括作为第一步骤的步骤，所述第一步骤构成相应的第一主表面 第一和第二半导体盘（200），用于限定入口阀的阀瓣结构（202）和第一盘中出口阀的阀座结构（204）和出口阀的阀瓣结构和 进口阀的阀座结构在第二盘中。 在此之后，阀瓣结构（206; 216）和阀开口井结构（208; 218）以与阀瓣结构和阀座结构预定的关系形成在第一和第二主表面的相应第二主表面中 的第二半导体盘。 所述第一和第二半导体盘的第一主表面以这样的方式连接，使得相应的阀瓣结构以相应的阀座结构预定的关系布置。 最后，至少在阀瓣井结构和阀门开口井结构的区域中蚀刻所述第一和所述第二半导体盘的相应的第二主表面，以暴露阀瓣并打开阀座。

公开(公告)号：US06261066B1

公开(公告)日：2001-07-17

申请号：US09423512

申请日：1999-11-10

申请人： Reinhard Linnemann ,  Martin Richter ,  Stefan Kluge ,  Peter Woias

发明人： Reinhard Linnemann ,  Martin Richter ,  Stefan Kluge ,  Peter Woias

IPC分类号： F04B4304

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094

摘要： A micromembrane pump comprises a pump membrane which is adapted to be moved to a first and a second position with the aid of a drive means and a pump body connected to the pump membrane so as to define a pump chamber between these two components, the pump body being defined by two semiconductor plates having each formed therein a valve seat and a valve flap which are formed integrally with the respective semiconductor plate, the two semiconductor plates being connected in such a way that a respective passive non-return valve is defined by a valve seat of one semiconductor plate and by a valve flap of the other semiconductor plate, one of the passive non-return valves being arranged in an inlet opening penetrating both semiconductor plates, whereas the other of the non-return valves is arranged in an outlet opening penetrating both semiconductor plates. The pump membrane increases the volume of the pump chamber by a stroke volume when moving from the first to the second position and reduces the volume of the pump chamber by this stroke volume when moving from the second to the first position. According to the present invention, the ratio &egr; of the stroke volume to the volume of the pump chamber satisfies the following equation, when the pump membrane is at the first position: ϵ ≥ ( p 0 p 0 - &LeftBracketingBar; Δ ⁢   ⁢ p crit &RightBracketingBar; ) 1 γ - 1 wherein p0 is the atmospheric pressure, &Ggr; the adiabatic coefficient, and &Dgr;pcrit the maximum pressure value which depends on the valve geometry and on the wetting of the valves and which is required for opening the valves.

摘要翻译： 微膜泵包括泵膜，其适于通过驱动装置和连接到泵膜的泵体移动到第一和第二位置，以便在这两个部件之间限定泵室，泵 主体由两个半导体板限定，每个半导体板在其中形成有与相应半导体板一体形成的阀座和阀瓣，两个半导体板以这样的方式连接，使得相应的被动止回阀由 一个半导体板的阀座和另一个半导体板的阀瓣，其中一个无源止回阀布置在穿过两个半导体板的入口中，而另一个止回阀布置在出口 打开两个半导体板。 当从第一位置移动到第二位置时，泵膜使泵室的体积增加了行程容积，并且当从第二位置移动到第一位置时，泵室的体积减小了该冲程容积。 根据本发明，当泵膜处于第一位置时，行程体积与泵室容积的比εi满足下列等式：其中p0是大气压，＆Ggr; 绝热系数和DELTApcrit取决于阀几何形状和阀的润湿的最大压力值，并且是打开阀门所需的最大压力值。