发明授权
US06403972B1 Methods and apparatus for alignment of ion beam systems using beam current sensors
有权
使用光束电流传感器对离子束系统进行对准的方法和装置
- 专利标题: Methods and apparatus for alignment of ion beam systems using beam current sensors
- 专利标题(中): 使用光束电流传感器对离子束系统进行对准的方法和装置
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申请号: US09349828申请日: 1999-07-08
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公开(公告)号: US06403972B1公开(公告)日: 2002-06-11
- 发明人: Antonella Cucchetti , Leo Vincent Klos, Jr. , Joseph C. Olson , Raymond L. Pelletier , Keith Pierce , Anthony Renau , Donna Smatlak
- 申请人: Antonella Cucchetti , Leo Vincent Klos, Jr. , Joseph C. Olson , Raymond L. Pelletier , Keith Pierce , Anthony Renau , Donna Smatlak
- 主分类号: H01J3730
- IPC分类号: H01J3730
摘要:
An ion beam is sensed with a beam current sensor which has a sensing aperture that is smaller than a cross-sectional dimension of the ion beam at the beam current sensor. The sensed ion beam current is indicative of ion beam position relative to a desired ion beam path. The ion beam position may be adjusted if the sensed ion beam position differs from the desired ion beam path. One or more beam current sensors may be utilized in an ion implanter for calibration and/or alignment. The beam current sensor may be utilized to determine a relation between a characteristic of an ion beam, such as magnetic rigidity, and a parameter of a system element, such as magnetic field, required to direct the ion beam along a desired ion beam path.
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