发明授权
- 专利标题: Endpoint detection and novel chemicals in copper stripping
- 专利标题(中): 铜剥离中的端点检测和新型化学品
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申请号: US09376426申请日: 1999-08-18
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公开(公告)号: US06419754B1公开(公告)日: 2002-07-16
- 发明人: Simon Chooi , Mei Sheng Zhou
- 申请人: Simon Chooi , Mei Sheng Zhou
- 主分类号: C23G116
- IPC分类号: C23G116
摘要:
An endpoint detection system for copper stripping using a colorimetric analysis of the change in concentration of a component is described. Wet copper stripping chemicals are used to strip copper from a wafer whereby an eluent is produced. The eluent is continuously analyzed by colorimetric analysis for the presence of copper. The copper stripping process is stopped when the presence of copper is no longer detected. Also novel compounds or chemicals for use in an endpoint detection system for copper stripping using a colorimetric analysis of the change in concentration of the novel compounds or chemicals are described. A composition of matter that serves as an indicator of the presence of copper by colorimetric analysis comprises: 1) Fast Sulphon Black F indicator and an ammonium ion-containing solution or 2) a complexing agent, comprising a diamine, an amine macrocycle, or a monoamine.
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