- 专利标题: Low dielectric constant materials with polymeric networks
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申请号: US09619237申请日: 2000-07-19
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公开(公告)号: US06423811B1公开(公告)日: 2002-07-23
- 发明人: Kreisler S. Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Ruslan Zherebin , David Nalewajek
- 申请人: Kreisler S. Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Ruslan Zherebin , David Nalewajek
- 主分类号: C08G802
- IPC分类号: C08G802
摘要:
A low dielectric constant material has a polymeric network that is fabricated from a first and a second component. The first component comprises a polymeric strand, and the second component comprises a molecule having a central portion with at least three arms extending from the central portion, wherein each of the arms includes a backbone with a reactive group. The first component and the second component form the polymeric network in a reaction that involves at least one of the reactive groups when the first and second components are thermally activated. Contemplated low dielectric constant materials are advantageously employed in the fabrication of electronic devices, and particularly contemplated devices include integrated circuits.
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