发明授权
- 专利标题： Polishing pads and methods relating thereto
- 专利标题（中）： 抛光垫及其相关方法
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申请号： US09862734申请日： 2001-05-22
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公开(公告)号： US06425816B1公开(公告)日： 2002-07-30
- 发明人: John V. H. Roberts , David B. James , Lee Melbourne Cook , Charles W. Jenkins
- 申请人： John V. H. Roberts , David B. James , Lee Melbourne Cook , Charles W. Jenkins
- 主分类号： B24B100
- IPC分类号： B24B100
摘要：
Polishing pads are provided having a polishing surface formed from a material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.