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公开(公告)号:US06425816B1
公开(公告)日:2002-07-30
申请号:US09862734
申请日:2001-05-22
IPC分类号: B24B100
CPC分类号: B24B37/26 , B24B41/047 , B24D3/26 , B24D3/28
摘要: Polishing pads are provided having a polishing surface formed from a material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
摘要翻译: 提供具有由材料形成的抛光表面的抛光垫。 抛光表面具有通过热成型工艺制成的形貌。 地形由大和小的特征组成,有助于抛光液的流动,并促进平滑和平坦化。
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公开(公告)号:US06739962B2
公开(公告)日:2004-05-25
申请号:US10137056
申请日:2002-05-01
IPC分类号: B24B100
CPC分类号: B24B37/26 , B24B41/047 , B24D3/26 , B24D3/28
摘要: Polishing pads are provided having a polishing surface formed from a material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
摘要翻译: 提供具有由材料形成的抛光表面的抛光垫。 抛光表面具有通过热成型工艺制成的形貌。 地形由大和小的特征组成,有助于抛光液的流动,并促进平滑和平坦化。
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公开(公告)号:US06287185B1
公开(公告)日:2001-09-11
申请号:US09514717
申请日:2000-02-28
IPC分类号: B24B100
CPC分类号: B24B37/26 , B24B41/047 , B24D3/26 , B24D3/28
摘要: Polishing pads are provided having a polishing surface formed from a hydrophilic material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
摘要翻译: 抛光垫具有由亲水材料形成的抛光表面。 抛光表面具有通过热成型工艺制成的形貌。 地形由大和小的特征组成,有助于抛光液的流动,并促进平滑和平坦化。
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公开(公告)号:US5489233A
公开(公告)日:1996-02-06
申请号:US224768
申请日:1994-04-08
IPC分类号: A47L13/28 , B24B37/26 , B24D3/28 , B24D11/00 , B24D11/02 , B24D13/00 , H01L21/304 , B24B1/00
摘要: An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
摘要翻译: 提供了一种改进的抛光垫,其包括固体均匀聚合物片材,该固体均匀聚合物片材在使用过程中不具有吸收或输送浆料颗粒的固有能力,其具有同时存在的具有大的和小的流动通道的表面纹理或图案,其允许浆料跨越 抛光垫,其中所述通道不是材料结构的一部分,而是在焊盘表面上机械地制造。 在本发明的优选方案中,垫纹理包括在使用前产生的宏观纹理和在使用垫期间以规则选择的间隔由多个小磨料点磨损产生的微纹理。
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公开(公告)号:US4191541A
公开(公告)日:1980-03-04
申请号:US933567
申请日:1978-08-14
申请人: Charles W. Jenkins
发明人: Charles W. Jenkins
CPC分类号: B01D53/30 , G01N33/0011 , F25B9/04
摘要: Apparatus for withdrawing a gas from a source and conditioning the gas for subsequent analysis for total reduced sulfur content comprising a gas probe having an inlet for a stream of gas and an outlet therefor, a conduit having means to provide heat to a gas stream flowing therein extending from the probe outlet to a condenser for cooling the gas and condensing out water, a second conduit from the condenser to a vacuum which causes a gas stream to enter the probe and flow through the heatable conduit to the condenser and then the second conduit, a third conduit for delivering a stream of gas from the second conduit to a scrubber to wash the gas stream with a scrubbing liquid, a demistor for removing the gas stream from the scrubber and separating entrained scrubbing liquid, and a pump for pumping the scrubbed gas stream, from which scrubbing liquid has been removed, to an analyzer and flow meter.A method of conditioning the gas for analysis using the apparatus is also disclosed.
摘要翻译: 用于从源抽出气体并调节气体用于随后分析总的还原硫含量的装置,包括具有用于气流和其出口的入口的气体探针,导管,其具有向在其中流动的气流提供热量的装置 从探针出口延伸到用于冷却气体并冷凝水的冷凝器,从冷凝器到真空的第二导管,其导致气流进入探针并流过可加热管道到冷凝器,然后流过第二管道, 用于将气流从第二管道输送到洗涤器以用洗涤液体洗涤气流的第三管道,用于从洗涤器除去气流并分离夹带的洗涤液体的去霉晶体,以及用于泵送洗涤气体的泵 已经从中清除洗涤液的流到分析器和流量计。 还公开了使用该装置调节用于分析的气体的方法。
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