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US06429570B1 Surface acoustic wave device 失效
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Surface acoustic wave device
摘要:
A surface acoustic wave device includes a substrate and an inter-digital electrode on a surface of the substrate, wherein the substrate is formed by cutting out of a single crystal represented by a chemical formula, La&agr;Ta&bgr;Ga&ggr;O&dgr;(2.9≦&agr;≦3.1, 0.48≦&bgr;≦0.52, 5.4≦&ggr;≦5.6 and 8≦&dgr;≦14); a cut angle of the substrate cut out of the single crystal and a direction of propagation of surface acoustic waves on the substrate represented in terms of Euler's angles (&phgr;, &thgr;, &psgr;), &phgr;, &thgr; and &psgr; are found in one of a first area represented by −5 degrees≦&phgr;≦−5 degrees, 135 degrees≦&thgr;≦150 degrees and 20 degrees
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