发明授权
- 专利标题: Semiconductor integrated circuit device
- 专利标题(中): 半导体集成电路器件
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申请号: US09661372申请日: 2000-09-13
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公开(公告)号: US06433398B1公开(公告)日: 2002-08-13
- 发明人: Kazuhisa Suzuki , Toshiro Takahashi , Yasunobu Yanagisawa , Yusuke Nonaka
- 申请人: Kazuhisa Suzuki , Toshiro Takahashi , Yasunobu Yanagisawa , Yusuke Nonaka
- 优先权: JP11-259460 19990913
- 主分类号: H01L2972
- IPC分类号: H01L2972
摘要:
A capacitive element C1 having a small leakage current is formed by utilizing a gate oxide film 9B thicker than that of a MISFET of a logic section incorporated in a CMOS gate array, without increasing the number of steps of manufacturing the CMOS gate array. The capacitive element C1has a gate electrode 10E. A part of the gate electrode 10E is made of a polycrystalline silicon film. The polycrystalline silicon film is doped with n-type impurities, so that the capacitive element may reliably operate even at a low power-supply voltage.
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