发明授权
US06444523B1 Method for fabricating a memory device with a floating gate 有权
用于制造具有浮动栅极的存储器件的方法

Method for fabricating a memory device with a floating gate
摘要:
A fabrication method for a memory device with a floating gate is provided. A substrate is provided. A channel doping step is performed on the substrate, wherein the actual threshold voltage of the subsequently formed memory device becomes greater than the preset threshold voltage. A stack gate and source/drain regions are then sequentially formed on the substrate to complete the formation of the memory device. The drain-turn-on leakage is prevented by an increase of the actual threshold voltage.
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