发明授权
- 专利标题: Method for fabricating a memory device with a floating gate
- 专利标题(中): 用于制造具有浮动栅极的存储器件的方法
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申请号: US09860422申请日: 2001-05-18
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公开(公告)号: US06444523B1公开(公告)日: 2002-09-03
- 发明人: Tso-Hung Fan , Tao-Cheng Lu , Wen-Jer Tsai , Samuel Pan
- 申请人: Tso-Hung Fan , Tao-Cheng Lu , Wen-Jer Tsai , Samuel Pan
- 优先权: TW90108179A 20010404
- 主分类号: H01L21336
- IPC分类号: H01L21336
摘要:
A fabrication method for a memory device with a floating gate is provided. A substrate is provided. A channel doping step is performed on the substrate, wherein the actual threshold voltage of the subsequently formed memory device becomes greater than the preset threshold voltage. A stack gate and source/drain regions are then sequentially formed on the substrate to complete the formation of the memory device. The drain-turn-on leakage is prevented by an increase of the actual threshold voltage.
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