发明授权
- 专利标题: Method for manufacturing a hard disk read/write unit, with micrometric actuation
- 专利标题(中): 制造硬盘读/写单元的方法,具有微动作动
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申请号: US09305862申请日: 1999-05-05
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公开(公告)号: US06446326B1公开(公告)日: 2002-09-10
- 发明人: Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
- 申请人: Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
- 优先权: EP98830269 19980505
- 主分类号: G11B5127
- IPC分类号: G11B5127
摘要:
The method comprises the steps of: forming an integrated device including a microactuator in a semiconductor material wafer; forming an immobilization structure of organic material on the wafer; simultaneously forming a securing flange integral with the microactuator and electrical connections for connecting the integrated device to a read/write head; bonding a transducer supporting the read/write head to the securing flange; connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the microactuator to a suspension; and removing the immobilization structure.
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