发明授权
- 专利标题: Direct imaging polymer fluid jet orifice
- 专利标题(中): 直接成像聚合物流体喷射孔
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申请号: US09605081申请日: 2000-06-26
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公开(公告)号: US06447102B1公开(公告)日: 2002-09-10
- 发明人: Chien-Hau Chen , Donald E. Wenzel , Qin Liu , Naoto Kawamura , Richard W. Seaver , Carl Wu , Colby Van Vooren , Jeffery S. Hess , Colin C. Davis
- 申请人: Chien-Hau Chen , Donald E. Wenzel , Qin Liu , Naoto Kawamura , Richard W. Seaver , Carl Wu , Colby Van Vooren , Jeffery S. Hess , Colin C. Davis
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
A process for creating and an apparatus employing shaped orifices in a semiconductor substrate. A first layer of material is applied on the semiconductor substrate then a second layer of material is then applied upon the first layer of material. An orifice image is then transferred to the first layer of material and a fluid-well image is transferred to the second layer of material. That portion of the second layer of material where the orifice image is located is then developed along with that portion of the first layer of material where the fluid well is located to define an orifice in the substrate.
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