发明授权
- 专利标题: Apparatus and method for use in manufacturing semiconductor devices
- 专利标题(中): 用于制造半导体器件的装置和方法
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申请号: US08576185申请日: 1995-12-21
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公开(公告)号: US06448169B1公开(公告)日: 2002-09-10
- 发明人: William Brearley , Laertis Economikos , Paul F. Findeis , Kimberley A. Kelly , Bouwe W. Leenstra , Arthur Gilman Merryman , Eric Daniel Perfecto , Chandrika Prasad , James Patrick Wood , Roy Yu
- 申请人: William Brearley , Laertis Economikos , Paul F. Findeis , Kimberley A. Kelly , Bouwe W. Leenstra , Arthur Gilman Merryman , Eric Daniel Perfecto , Chandrika Prasad , James Patrick Wood , Roy Yu
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
An apparatus for use in manufacturing a semiconductor device includes an input-output (IO) face having a plurality of IO lands, and is situated in an operating position in abutting relation with a depositor. The apparatus includes a first holding member holding the depositor in a first position; a second holding member holding the semiconductor device in the operating position. The depositor and the semiconductor device cooperate in the operating position to deposit solder ball connection structures to the IO lands. The apparatus further includes a separating member for moving at least one of the depositor and the semiconductor device from the operating position to an interim orientation. The interim orientation establishes a separation distance intermediate the depositor and the semiconductor device appropriate to disengage the solder ball connecting structures from the depositor.
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