Invention Grant
- Patent Title: Method of manufacturing an integrated semiconductor laser-modulator device
- Patent Title (中): 制造集成半导体激光调制装置的方法
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Application No.: US09400531Application Date: 1999-09-21
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Publication No.: US06455338B1Publication Date: 2002-09-24
- Inventor: Kazuhisa Takagi , Hitoshi Tada , Tohru Takiguchi
- Applicant: Kazuhisa Takagi , Hitoshi Tada , Tohru Takiguchi
- Priority: JP11-085473 19990329
- Main IPC: H01L2120
- IPC: H01L2120

Abstract:
An integrated semiconductor laser-modulator device less affected by a fluctuating electric field due to modulating signals applied to the modulator has improved frequency characteristics. The integrated semiconductor laser-modulator includes an active layer, a beam waveguide layer having a bulk structure with a bandgap energy larger than that of the active layer but smaller than that of a laser beam absorption layer having a bulk structure, wherein waveguides of the laser and modulator are connected and aligned, and a cladding layer including a diffraction grating is disposed on top of or beneath the waveguides.
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