发明授权
US06463348B1 Process control device and process control method enabling restoration of lot control
失效
过程控制装置和过程控制方法能够恢复批次控制
- 专利标题： Process control device and process control method enabling restoration of lot control
- 专利标题（中）： 过程控制装置和过程控制方法能够恢复批次控制
-
申请号： US09354576申请日： 1999-07-16
-
公开(公告)号： US06463348B1公开(公告)日： 2002-10-08
- 发明人: Ryuji Takechi , Yasuhiro Marume , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
- 申请人： Ryuji Takechi , Yasuhiro Marume , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
- 优先权： JP11-041319 19990219
- 主分类号： G06F1900
- IPC分类号： G06F1900
摘要：
A process control device for controlling a processing device and a transport apparatus while updating process information of a lot includes: a control information update unit to update control information for controlling the processing device and the transport apparatus; a work-in-process information update unit to update the work-in-process information indicating a location of a lot; a processing device control unit to control the processing device according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information updated unit; and a transport apparatus control unit to control the transport apparatus according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information update unit. The control information update unit deletes, when trouble occurs, the control information of a lot that is in process at a location where the trouble occurred. Thus, it is possible to release the lot from control of the process control device, and to prevent control of other lots from being restricted.