发明授权
US06465894B2 Semiconductor device having bed structure underlying electrode pad 有权
半导体器件具有位于电极焊盘下方的床结构

  • 专利标题: Semiconductor device having bed structure underlying electrode pad
  • 专利标题(中): 半导体器件具有位于电极焊盘下方的床结构
  • 申请号: US09907659
    申请日: 2001-07-19
  • 公开(公告)号: US06465894B2
    公开(公告)日: 2002-10-15
  • 发明人: Noboru Koike
  • 申请人: Noboru Koike
  • 优先权: JP8-133028 19960528
  • 主分类号: H01L2941
  • IPC分类号: H01L2941
Semiconductor device having bed structure underlying electrode pad
摘要:
A semiconductor device has: a semiconductor substrate having a surface which has a predetermined pattern, in which an insulating layer is embedded; an interlayer insulator film formed on the substrate, the interlayer insulator film having a protective coat for protecting the substrate; and an electrode formed on the interlayer insulator film. In addition, a method for manufacturing a semiconductor device comprises the steps of: forming a semiconductor substrate having a surface which has a groove in which an insulating layer is embedded; forming a protective coat for protecting the surface of the semiconductor substrate, on the upper surface of the insulating layer embedded in the groove; and forming an electrode on the protective coat. According to the semiconductor device and the method for manufacturing the same, it is possible to more sufficiently planarize the surface of the insulating layer by the rotary polishing method, and it is possible to decrease the bonding damage applied to a underlayer portion serving as a bed of the semiconductor device when carrying out the wire bonding.
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