发明授权
- 专利标题: Magnetic disk and method of making thereof
- 专利标题(中): 磁盘及其制造方法
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申请号: US09598454申请日: 2000-06-22
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公开(公告)号: US06468598B1公开(公告)日: 2002-10-22
- 发明人: Masahiro Hatakeyama , Katsunori Ichiki , Kenji Watanabe , Kazuo Yamauchi , Shinta Kunitomo , Tohru Satake , Yasushi Tohma , Juichi Ishiguro
- 申请人: Masahiro Hatakeyama , Katsunori Ichiki , Kenji Watanabe , Kazuo Yamauchi , Shinta Kunitomo , Tohru Satake , Yasushi Tohma , Juichi Ishiguro
- 主分类号: B05D500
- IPC分类号: B05D500
摘要:
It is an object of the present invention to provide a method of making a magnetic disk having a uniform textured structure with micro-waviness of fabrication depth of less than 20 nm, preferably less than 10 nm, and a local depth deviation of less than 5%, in which texture patterns are characterized by the fact that lateral surfaces of the structure are sloped or curved. The object has been achieved in a method for making a magnetic disk, having micro-waviness on a fabrication surface of a substrate for reducing dynamic friction and controlling head float, by rotating and irradiating the fabrication surface with a high energy beam from a beam surface at an inclined angle to the substrate surface. The surface is irradiated through a shielding mask having a specific pattern, so as to produce a transcription pattern on the substrate surface to produce a textured structure with micro-waviness having sloped or curved side surfaces.
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