发明授权
US06479098B1 Method to solve particle performance of FSG layer by using UFU season film for FSG process
有权
通过使用UFU季膜对FSG过程解决FSG层的粒子性能的方法
- 专利标题： Method to solve particle performance of FSG layer by using UFU season film for FSG process
- 专利标题（中）： 通过使用UFU季膜对FSG过程解决FSG层的粒子性能的方法
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申请号： US09747135申请日： 2000-12-26
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公开(公告)号： US06479098B1公开(公告)日： 2002-11-12
- 发明人: Ming-Hwa Yoo , Yi-Lung Cheng , Szu-An Wu , Ying-Lang Wang
- 申请人： Ming-Hwa Yoo , Yi-Lung Cheng , Szu-An Wu , Ying-Lang Wang
- 主分类号： C23C1640
- IPC分类号： C23C1640
摘要：
A method for reducing contaminants in a processing chamber 10 having chamber plasma processing region components comprising the following steps. The chamber plasma processing region components are cleaned. The chamber is then seasoned as follows. A first USG layer is formed over the chamber plasma processing region components. An FSG layer is formed over the first USG layer. A second USG layer is formed over the FSG layer. Wherein the USG, FSG, and second USG layers comprise a UFU season film. A UFU season film coating the chamber plasma processing region components of a processing chamber comprises: an inner USG layer over the chamber plasma processing region components; an FSG layer over the inner USG layer; and an outer USG layer over the FSG layer.
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