- 专利标题: Semiconductor integrated circuit device and process for manufacturing the same
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申请号: US09051978申请日: 1998-04-24
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公开(公告)号: US06479899B1公开(公告)日: 2002-11-12
- 发明人: Takuya Fukuda , Nobuyoshi Kobayashi , Yoshitaka Nakamura , Masayoshi Saito , Shinichi Fukada , Yoshifumi Kawamoto
- 申请人: Takuya Fukuda , Nobuyoshi Kobayashi , Yoshitaka Nakamura , Masayoshi Saito , Shinichi Fukada , Yoshifumi Kawamoto
- 优先权: JP7-280957 19951027
- 主分类号: H01L2348
- IPC分类号: H01L2348
摘要:
The new structure of a memory cell which enables avoiding the problem of a step without increasing the number of processes, the structure of a semiconductor integrated circuit in which a common part of the same substrate in a manufacturing process is increased and the structure of the semiconductor integrated circuit which allows measures for environment obstacles without increasing the number of processes are disclosed. Memory cell structure in which a capacitor is formed in the uppermost layer of plural metal wiring layers by connecting the storage node of the capacitor to a diffusion layer via plugs and pads is adopted. It is desirable that a dielectric film formed in a metal wiring layer under the uppermost layer and a supplementary capacitor composed of a storage node and a plate electrode are connected to the capacitor. It is also desirable that the plate electrode of the capacitor covers the chip.
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