发明授权
- 专利标题: Sidewall electrodes for electrostatic actuation and capacitive sensing
- 专利标题(中): 用于静电驱动和电容感测的侧壁电极
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申请号: US09772084申请日: 2001-01-30
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公开(公告)号: US06480645B1公开(公告)日: 2002-11-12
- 发明人: David R. Peale , Patrick Breckow Chu , Sangtae Park , Nicolas H. Bonadeo , Shi-Sheng Lee , Ming-Ju Tsai
- 申请人: David R. Peale , Patrick Breckow Chu , Sangtae Park , Nicolas H. Bonadeo , Shi-Sheng Lee , Ming-Ju Tsai
- 主分类号: G02B626
- IPC分类号: G02B626
摘要:
A structure and method for an optical switch is provided that includes providing sidewall electrodes with steerable micro-mirrors to position and control micro-mirror movement. The structure and method includes using the sidewall electrodes in conjunction with electrodes underlying a micro-mirror to sense capacitance present between a micro-mirror and underlying electrodes and/or sidewall electrodes, and driving the electrodes underlying the micro-mirror and the sidewall electrodes to move the micro-mirror into an angular position. The electrode structures and methods of driving them may be used in systems with closed loop feedback control to reduce transient mirror settling time and provide substantial immunity to system perturbations when micro-mirrors switch an optical signal from an input fiber to an output fiber of the optical switch, or when a micro-mirror is held at an angular position over long time scales.