Optical switch with an array of offset angled micro-mirrors
    1.
    发明授权
    Optical switch with an array of offset angled micro-mirrors 失效
    具有偏移角度微镜阵列的光学开关

    公开(公告)号:US06628857B1

    公开(公告)日:2003-09-30

    申请号:US09757475

    申请日:2001-01-11

    CPC classification number: G02B6/3556 G02B6/3518 G02B6/357 G02B26/0841

    Abstract: An optical network element uses steerable mirrors in an optical switch to couple optical inputs and optical outputs. An optical switch has at least one array of the steerable mirrors, which can be oriented so as to reflect an optical signal between an input and an output. A shorter optical path between the input and the output reduces optical losses because optical losses in an optical switch using mirrors are directly proportional to the total length of the optical path. Reducing the optical path depends upon the switching tilt angle used in steering the mirrors. But tilting the micro-mirrors near their critical tilt angle or repeatedly across large tilt angles will degrade reliability or control. However, the total optical path can be shortened and the reliability of steerable mirrors can be maintained or increased if at least some of the micro-mirrors in an array are offset angled.

    Abstract translation: 光网络元件在光开关中使用可转向反射镜来耦合光输入和光输出。 光学开关具有可转向反射镜的至少一个阵列,其可以被定向成在输入和输出之间反射光信号。 输入和输出之间的较短的光路减少了光学损耗,因为使用反射镜的光学开关中的光学损耗与光路的总长度成正比。 减小光路取决于在转向反射镜时使用的切换倾斜角度。 但是,将微型反射镜倾斜到临界倾斜角度或者在大的倾斜角度上重复的倾斜将降低可靠性或控制。 然而,如果阵列中的至少一些微反射镜偏斜成角度,则可以缩短总光路并且可以维持或增加可转向反射镜的可靠性。

    Optical switch and method for aligning optical switch components
    3.
    发明授权
    Optical switch and method for aligning optical switch components 失效
    光开关和光开关组件对准的方法

    公开(公告)号:US06591029B1

    公开(公告)日:2003-07-08

    申请号:US09754395

    申请日:2001-01-05

    Abstract: An optical switch having a fiber/lens array and a switching substrate may be properly aligned using one or more grating(s) provided on the switching substrate. The grating(s) may be designed to have a predetermined response when the fiber/lens array and switching substrate are properly aligned. For example, the grating(s) may reflect incident light back into an input fiber, where the back-reflected light may be detected. Accordingly, the position of the switching substrate and/or fiber/lens array may be adjusted until back reflected light having predetermined power is detected.

    Abstract translation: 可以使用设置在开关基板上的一个或多个光栅来适当地对准具有光纤/透镜阵列和开关基板的光学开关。 当光纤/透镜阵列和开关衬底被适当对准时,光栅可被设计成具有预定的响应。 例如,光栅可以将入射光反射回输入光纤,其中可以检测背反射光。 因此,可以调整切换基板和/或光纤/透镜阵列的位置,直到检测到具有预定功率的反射光。

    Optical switch having MEMS array with reduced optical loss
    4.
    发明授权
    Optical switch having MEMS array with reduced optical loss 失效
    具有MEMS阵列的光开关具有减小的光损耗

    公开(公告)号:US06690849B1

    公开(公告)日:2004-02-10

    申请号:US09754260

    申请日:2001-01-05

    Abstract: An optical switch includes a plurality of first optical fibers, a plurality of second optical fibers, a first MEMS array, and a second MEMS array. The first MEMS array is optically coupled with the first optical fibers to receive optical signals from the first optical fibers and to direct the optical signals, wherein the first MEMS array defines a first array incidence angle between a normal direction to the first MEMS array and a direction of the received optical signals. The second MEMS array is optically coupled with the first MEMS array to receive the directed optical signals and to re-direct the directed optical signals with the second optical fibers wherein the second MEMS array defines a second array incidence angle between a normal direction to second MEMS array and a direction of the re-directed optical signals. The configuration of the components is provided to provide reduced optical losses.

    Abstract translation: 光开关包括多个第一光纤,多个第二光纤,第一MEMS阵列和第二MEMS阵列。 第一MEMS阵列与第一光纤光学耦合以接收来自第一光纤的光信号并引导光信号,其中第一MEMS阵列限定了在与第一MEMS阵列的法线方向之间的第一阵列入射角和 接收光信号的方向。 第二MEMS阵列与第一MEMS阵列光学耦合以接收定向光信号并且用第二光纤重新定向定向光信号,其中第二MEMS阵列限定法向第二MEMS之间的第二阵列入射角 阵列和重定向光信号的方向。 提供组件的配置以提供减少的光学损耗。

    Sidewall electrodes for electrostatic actuation and capacitive sensing
    5.
    发明授权
    Sidewall electrodes for electrostatic actuation and capacitive sensing 失效
    用于静电驱动和电容感测的侧壁电极

    公开(公告)号:US06480645B1

    公开(公告)日:2002-11-12

    申请号:US09772084

    申请日:2001-01-30

    CPC classification number: G02B6/357 G02B6/3518 G02B6/3556 G02B6/356 G02B6/359

    Abstract: A structure and method for an optical switch is provided that includes providing sidewall electrodes with steerable micro-mirrors to position and control micro-mirror movement. The structure and method includes using the sidewall electrodes in conjunction with electrodes underlying a micro-mirror to sense capacitance present between a micro-mirror and underlying electrodes and/or sidewall electrodes, and driving the electrodes underlying the micro-mirror and the sidewall electrodes to move the micro-mirror into an angular position. The electrode structures and methods of driving them may be used in systems with closed loop feedback control to reduce transient mirror settling time and provide substantial immunity to system perturbations when micro-mirrors switch an optical signal from an input fiber to an output fiber of the optical switch, or when a micro-mirror is held at an angular position over long time scales.

    Abstract translation: 提供了一种用于光开关的结构和方法,其包括向侧壁电极提供可转向微镜以定位和控制微镜运动。 结构和方法包括将侧壁电极与微镜下面的电极结合使用来感测存在于微反射镜和下面的电极和/或侧壁电极之间的电容,并且将微镜和侧壁电极下面的电极驱动到 将微镜移动到角位置。 驱动它们的电极结构和方法可以用于具有闭环反馈控制的系统中,以减少瞬时反射镜建立时间,并且当微镜将光信号从输入光纤切换到光学输出光纤时,可以提供对系统扰动的实质性抗扰度 或者当微镜在长时间刻度上保持在角度位置时。

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