发明授权
US06482301B1 Target shields for improved magnetic properties of a recording medium
有权
用于提高记录介质的磁性能的目标屏蔽
- 专利标题: Target shields for improved magnetic properties of a recording medium
- 专利标题(中): 用于提高记录介质的磁性能的目标屏蔽
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申请号: US09326245申请日: 1999-06-04
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公开(公告)号: US06482301B1公开(公告)日: 2002-11-19
- 发明人: Qixu Chen , Charles Leu , Mark Anthony Shows , Paul Stephen McLeod , Rajiv Yadav Ranjan
- 申请人: Qixu Chen , Charles Leu , Mark Anthony Shows , Paul Stephen McLeod , Rajiv Yadav Ranjan
- 主分类号: C23C1432
- IPC分类号: C23C1432
摘要:
A collimator system is disclosed for use in an in-line pass-by sputtering system during the fabrication of recording media to improve the data storage density and read/write performance characteristics of the media. The collimator system includes a collimator shield and a collimator honeycomb. The shield includes a rectangular tube having a flange and a frame at inner and outer ends, respectively. The various components of the shield in part serve to prevent possible contamination of substrates due to target atom accumulation on the chamber walls during the sputtering process. The collimator honeycomb is provided for blocking target atoms from contacting the substrate at low incident angles. The collimator honeycomb is comprised of a plurality of collimators which are identical to each other. In a preferred embodiment, the collimators have a hexagonal cross-section taken from a perspective perpendicular to the substrate. The collimators may also have other geometric shapes. It is also contemplated that more than one collimator honeycomb level be used in alternative embodiments.
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