摘要:
A collimator system is disclosed for use in an in-line pass-by sputtering system during the fabrication of recording media to improve the data storage density and read/write performance characteristics of the media. The collimator system includes a collimator shield and a collimator honeycomb. The shield includes a rectangular tube having a flange and a frame at inner and outer ends, respectively. The various components of the shield in part serve to prevent possible contamination of substrates due to target atom accumulation on the chamber walls during the sputtering process. The collimator honeycomb is provided for blocking target atoms from contacting the substrate at low incident angles. The collimator honeycomb is comprised of a plurality of collimators which are identical to each other. In a preferred embodiment, the collimators have a hexagonal cross-section taken from a perspective perpendicular to the substrate. The collimators may also have other geometric shapes. It is also contemplated that more than one collimator honeycomb level be used in alternative embodiments.
摘要:
Magnetic recording media with high coercivity and low noise, suitable for high density longitudinal recording, are formed with a surface oxidized sub-seedlayer between a non-magnetic substrate and seedlayer. Embodiments include depositing a NiAl sub-seedlayer on a glass or glass-ceramic substrate, oxidizing the surface of the NiAl sub-seedlayer, and then sequentially depositing a NiAl seedlayer, Cr or Cr alloy underlayer, e.g., CrMo, an optional intermediate CoCrTa alloy layer, a magnetic layer, e.g., a Co-alloy magnetic layer, and a protective overcoat, e.g., a carbon-containing protective overcoat.
摘要:
High areal density magnetic recording media are formed with a thin CoCrTaOx intermediate layer which provides appropriate crystalline orientation and surface morphology for the nucleation and growth of a magnetic layer thereon having increased coercivity and high squareness, while avoiding high substrate heating temperatures. Embodiments include sputter depositing an intermediate layer comprising Co, about 10 to about 20 atomic % Cr and about 1 to about 6 atomic % Ta, at a thickness of about 1.5 to about 18 Å on a Cr or Cr alloy underlayer, allowing partial oxidation of the surface of the intermediate layer by residual oxygen in the sputtering system, and then sputter depositing a CoCrPtTa magnetic alloy layer thereon.
摘要:
A magnetic recording medium is provided with a dual layer protective overcoat system comprising a SiC corrosion barrier layer and a carbon-containing protective overcoat thereon. The SiC layer effectively prevents or significantly reduces Co and Ni diffusion to the medium surface. Embodiments include magnetic recording media comprising a SiC corrosion barrier layer over a magnetic layer, an overlying protective layer of amorphous hydrogenated carbon, amorphous nitrogenated carbon or amorphous hydrogen-nitrogenated carbon, and a lubricant topcoat thereon. Embodiments of the present invention further include magnetic recording media comprising Ni—P plated aluminum, Ni-plated glass or non-conductive substrates including glass, glass-ceramic and ceramic materials. Embodiments of the present invention further include a dual protective overcoat system having a combined thickness less than about 100 Å, such as less than about 75 Å, e.g., less than about 50 Å, with the SiC corrosion barrier layer having a thickness ranging from 1 Å to 40 Å.
摘要:
A high areal density magnetic recording medium exhibiting high Hc, high SNR, high S* and substantially isotropic magnetic properties is achieved by depositing a thin seedlayer before depositing the underlayer. Embodiments include heating the seedlayer under vacuum in the presence of residual oxygen to induce appropriate crystalline orientation and surface morphology for nucleation and growth of the underlayer and magnetic layer having substantially isotropic magnetic properties.
摘要:
A magnetic recording medium comprises, in overlying sequence from a surface of a non-magnetic substrate: at least one Cr-containing or B2-structured underlayer; a substantially non-magnetic CoCrPt alloy intermediate layer; and at least one CoCrPtB ferromagnetic alloy recording layer; wherein the intermediate layer of substantially non-magnetic CoCrPt alloy has a composition which facilitates Co (11.0) or (10.0) crystallographic orientation of the at least one CoCrPtB ferromagnetic alloy recording layer.
摘要:
Carbon or boron is added into the CoCr layers of a multiplayer perpendicular magnetic media structure to reduce media noise. The perpendicular magnetic media structure has sharp interfaces between Co-alloy layers and Pd or Pt layers and significantly reduced exchange coupling. In accordance with one embodiment of the invention, the perpendicular magnetic media structure with carbon or boron additives is 700 Å FeCo30.8B12/20 Å TaOx/700 Å FeCo30.8B12/20 Å TaOx/700 Å FeCo30.8B12/20 Å TaOx/158 Å FeCo30.8B12/17 Å Ta/49 Å ITO/33 Å CoCr37Ru10/2.5 Å COy/2.5 Å C/[(CoCr9)C6.8/Pd]19/50 Å CHN. [(CoCr9)C6.8/Pd]19 means 19 layers of the bi-layer stack (CoCr9)C6.8/Pd. TaOx stands for surface-oxidized Ta and COy stands for C oxides. ITO stands for Indium Tin Oxide and consists of In2O3 and Sn2O5 at 80 and 20 molecular percent respectively. CHN refers to hydrogenated and nitrogenated carbon.
摘要翻译:将碳或硼添加到多玩家垂直磁性介质结构的CoCr层中以降低介质噪声。 垂直磁介质结构在Co合金层和Pd或Pt层之间具有明显的界面,并显着降低了交换耦合。 根据本发明的一个实施方案,具有碳或硼添加剂的垂直磁性介质结构是700埃,30.8×12/20埃, 30/100FeCo 30.8 B 12/20Åx xÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅÅB B B B B B B B B B B B > 12/20ÅTaO x / 158ÅFeCo 30.8 B 12/17Å/ 49ITO / 33Å CoCr u> sub> / / / / / / / /((C)Cr C > 6.8 sub> / Pd] 19/50埃。 [(CoCr 9)C 6.8 / Pd] 19表示19层双层堆叠(CoCr 9 / / SUB >)C 6.8 / Pd。 TaO x代表表面氧化的Ta,CO 2代表C氧化物。 ITO代表氧化铟锡,由80和20组成的In 2 N 2 O 3和Sn 2 O 5 O 5组成。 分子百分比。 CHN是指氢化和氮化的碳。
摘要:
A high-saturation magnetization composite soft magnetic film can be deposited by magnetron co-sputtering of two or more kinds of materials using targets which have a lower saturation magnetization than that of a single target, which otherwise will be used to produce the resulting composite soft magnetic film. The composite film has a substantially uniform composition and thickness.
摘要:
Reproducible texturing of magnetic recording media is enhanced by sputtering a buffer layer, such as Ni—P, on a nonmagnetic substrate, prior to sputtering a textured bump layer. A magnetic recording medium comprising a sputter textured metal layer and high coercivity is achieved by employing an underlayer, such as NiAl or FeAl, preferably a composite underlayer containing a chromium or chromium-alloy layer and a NiAl layer, on the sputter textured layer. Advantageously, the buffer layer, underlayer, textured bump layer, magnetic layer and carbon overcoat can be sputter deposited in a single apparatus.
摘要:
A magnetic recording medium is formed by depositing a Cr-containing sub-underlayer on a surface oxidized seed layer, such as NiP, with direct current (DC) magnetron sputtering, depositing a NiAl or FeAl underlayer on the sub-underlayer, and depositing a Cr-containing intermediate layer on the NiAl or FeAl underlayer. The medium features high coercivity, low noise, and (200)-dominant underlayer crystallographic orientation, even with sub-underlayer deposition at temperatures as low as about 25.degree. C. The medium is suitable for high density longitudinal magnetic recording.