发明授权
- 专利标题: Simplified and enhanced SCARA arm
- 专利标题(中): 简化和增强的SCARA手臂
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申请号: US09771159申请日: 2001-01-26
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公开(公告)号: US06494666B2公开(公告)日: 2002-12-17
- 发明人: Kung Chris Wu , John M. Rush , Torben Ulander
- 申请人: Kung Chris Wu , John M. Rush , Torben Ulander
- 主分类号: B66C2300
- IPC分类号: B66C2300
摘要:
A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.
公开/授权文献
- US20020102155A1 Simplified and enhanced scara arm 公开/授权日:2002-08-01
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