公开(公告)号：US06494666B2

公开(公告)日：2002-12-17

申请号：US09771159

申请日：2001-01-26

申请人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

发明人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

IPC分类号： B66C2300

CPC分类号： B25J18/04 ,  B25J9/042 ,  B25J19/0079 ,  H01L21/67739

摘要： A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

摘要翻译： 适于运输半导体晶片的三自由度SCARA臂包括在臂的远端接头处的端部执行器组件。 在一种配置中，末端执行器将工件翻转过来。 臂包括具有突出在基部之上的开放柱组件的支撑柱。 在组件内，Z轴驱动器对由支撑柱承载的中空管的延伸和缩回起动作用。 绕Z轴可旋转并且具有远离支撑柱底部的远端的轴接收臂组件。 手臂组件旋转驱动器激励轴的旋转。 固定到轴的远端的臂基板从其支撑臂组件。 臂基板带有从Z轴移位的腕关节，并且接收通过末端执行器旋转驱动来使围绕腕关节轴旋转的末端执行器。

公开(公告)号：US6086323A

公开(公告)日：2000-07-11

申请号：US343110

申请日：1999-06-29

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67775 ,  H01L21/68707 ,  Y10S414/14

摘要： A method for unloading silicon wafers contained in a cassette from a sealed pod and supplying the wafers to an IC manufacturing process. The method includes receiving a base of the pod onto a loading platform of a pod loader interface and then unlocking the pod cover from the base. While maintaining the wafers in a clean mini-environment, the method raises the pod cover away from the base, contacts the now exposed cassette with an end effector of an articulated arm, secures the cassette to the end effector, and activates the arm to transport the wafers out of mini-environment for supplying the wafers to an IC manufacturing process. Preferably, the method further includes raising the articulated arm to lift the cassette before transferring the wafers to the process. Even more preferred, the method directs a flow of clean air within the mini-environment horizontally past the wafers.

摘要翻译： 一种用于从密封容器卸载包含在盒中的硅晶片并将晶片供应到IC制造工艺的方法。 该方法包括将荚的基部接收到荚果装载器界面的装载平台上，然后从荚底部解除荚盖。 在将晶片保持在干净的迷你环境中的同时，该方法使荚盖远离基座，将其与接合臂的末端执行器接触现在暴露的盒，将盒固定到端部执行器上，并且使臂移动 用于将晶片供应到IC制造工艺的微型环境中的晶片。 优选地，该方法还包括在将晶片转移到该过程之前提升铰接臂以抬起盒。 甚至更优选地，该方法引导微环境内的清洁空气流动水平地流过晶片。

公开(公告)号：US5193969A

公开(公告)日：1993-03-16

申请号：US703011

申请日：1991-05-20

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67781 ,  Y10S414/138

摘要： The present invention is a rotary, 3-stage wafer transfer machine. The transfer machine utilizes a pneumatically powered lift mechanism to raise wafers from a boat to a retaining area. If the next operation for the wafer is a single density operation (twenty-five wafers per boat), the wafers are the simply transferred to another boat for further processing. If the next operation for the wafers requires double density (fifty wafers per boat), a second set of wafers is lifted to the retaining area, where they are interspersed with the first set to create a double density set of fifth wafers. This set is then transferred to the appropriate boat (generally a quartz boat) for further processing. All components that could generate particulate contamination are sealed off from the transfer area. Extra duty materials are used for the components of the machine to provide unique reproducibility and eliminate much of the required maintenance as compared to the prior art. Lack of contamination and superior reproducibility allow increased yield in the manufacturing process.

摘要翻译： 本发明是旋转式3级晶片转印机。 转移机器利用气动提升机构将晶片从船上提升到保持区域。 如果晶片的下一个操作是单一密度操作（每个船只二十五个晶片），则晶片被简单地转移到另一个船上用于进一步处理。 如果晶片的下一次操作需要双重密度（每个船只五十个晶片），则第二组晶片被提升到保持区域，在那里它们与第一组散布，以产生双倍密度的第五晶片组。 然后将该组转移到适当的船（通常是石英舟）以进一步处理。 所有可能产生颗粒污染物的组分都与传输区域密封。 与现有技术相比，额外的功能材料用于机器的部件以提供独特的再现性并且消除了大量所需的维护。 缺乏污染和卓越的再现性，可以提高生产过程中的产量。

公开(公告)号：US5984610A

公开(公告)日：1999-11-16

申请号：US400039

申请日：1995-03-07

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67775 ,  H01L21/68707 ,  Y10S414/14

摘要： The pod loader interface is a machine that is able to automatically open a SMIF pod and unload the contents thereof. An elevator raises the SMIF cover away from its base to reveal the wafer boat contained in the SMIF pod. An articulated arm thereafter reaches through an opening in a bulkhead of the machine, securing the wafer cassette and withdrawing it through the hole in the bulkhead. The wafer cassette is then placed in position to be operated upon by the next step in the manufacturing process. The machine includes an integrated clean air system to provide a clean environment for the wafers.

摘要翻译： pod加载器接口是能够自动打开SMIF pod并卸载其内容的机器。 电梯将SMIF盖板从基座上抬起，以露出包含在SMIF吊舱中的晶片舟皿。 然后，铰接臂通过机器的隔板中的开口到达，固定晶片盒并将其取出通过隔板中的孔。 然后将晶片盒放置在制造过程中通过下一步操作的位置。 该机器包括集成的清洁空气系统，为晶片提供清洁的环境。

公开(公告)号：US06592317B1

公开(公告)日：2003-07-15

申请号：US09593245

申请日：2000-06-13

申请人： John M. Rush ,  Torben Ulander

发明人： John M. Rush ,  Torben Ulander

IPC分类号： B65G1133

CPC分类号： H01L21/68707

摘要： An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper plate. During gripping of a wafer carrier, the gripper blades initially close toward each other and then draw nearer to the gripper plate. Nested outer and inner U-shaped yokes, which may attach the gripper plate to the articulated arm, are joined by rotational joints to permit their relative rotation for reorienting the wafer carrier. Yet other aspect of the present invention are a mechanical forearm drive that provides substantially linear motion of an articulated arm's wrist joint, and an end effector rotary-drive included in a forearm of the articulated arm.

摘要翻译： 用于荚果装载器接口的端部执行器包括附接到铰接臂的夹持板。 一对夹持器叶片彼此分离并且联接到夹持板。 夹持晶片载体时，夹持器叶片最初朝向彼此靠近，然后更靠近夹板。 可以将夹持板附接到铰接臂的嵌套外U形轭和内U形轭通过旋转接头连接，以允许它们相对旋转以重新定向晶片载体。 本发明的另一方面是提供关节臂的腕关节的基本线性运动的机械前臂驱动器，以及包括在铰接臂的前臂中的末端执行器旋转驱动器。

公开(公告)号：US5506744A

公开(公告)日：1996-04-09

申请号：US234842

申请日：1994-04-28

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： H05F3/04 ,  H05F3/06 ,  H05F3/00

CPC分类号： H05F3/06 ,  H05F3/04

摘要： An ionized airflow manifold for static reduction. The manifold may be installed in a stand-alone frame, or attached to any processing machine. The manifold includes a commercially available gas ionizer that provides an ionized air supply, and creates an air curtain around a target area.

摘要翻译： 用于静电还原的电离气流歧管。 歧管可以安装在独立的框架中，或者连接到任何加工机器上。 歧管包括市售的气体离子发生器，其提供电离空气供应，并在目标区域周围产生气帘。

公开(公告)号：US06396072B1

公开(公告)日：2002-05-28

申请号：US09541199

申请日：2000-04-03

申请人： Eric Meyhofer ,  Kenneth A. Hardy ,  Cyril M. Kindt ,  Torben Ulander

发明人： Eric Meyhofer ,  Kenneth A. Hardy ,  Cyril M. Kindt ,  Torben Ulander

IPC分类号： G01N2186

CPC分类号： G06M1/101 ,  H01L21/67051 ,  H01L21/67265 ,  H01L21/67772

摘要： A load port interface for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a port closure assembly in a load port interface separating a process environment from an operator environment. A cover plate and a door are arranged in an L-shape, with both members being able to seal the port in a bulkhead of the load port interface. In one configuration, the cover plate seals the port, while door panel members rest horizontally on the operator side of the bulkhead. In this position, a wafer stack, W, inside of a cassette may be placed on the inside door panel, with the top of the wafer stack, W, being open. As the door is raised from the horizontal position to a vertical position, the wafer stack, W, is rotated through an opening in the bulkhead so that the wafer stack, W, is now on the process side. The wafer mapper features a moveable trolley connected to, or within, the door. The trolley can move parallel to the wafer stack, W, under control of a stepper motor and examine each row of the stack, counting wafers as light is reflected or scattered from the edges of the wafers. Each wafer may be optically probed through a window in a cover plate and characteristic signals may be plotted to provide subsequent wafer manufacturing operations with wafer locations. A movable air knife on a side of the window opposite the trolley is magnetically coupled to the trolley and is moved together with the trolley in order to clear the window of liquid droplets from the process environment. When the load port interface positions the cassette and wafer stack, W, in the process environment, a fine spray of liquid droplets may be directed about the wafer stack, W.

摘要翻译： 用于确定盒中晶片存在或不存在的负载端口接口（即晶片映射器）与分离工艺环境与操作者环境的负载端口接口中的端口闭合组件集成。 盖板和门布置成L形，两个构件能够将端口密封在负载端口接口的隔板中。 在一种构造中，盖板密封端口，而门板构件水平地搁置在隔板的操作者侧。 在这个位置上，盒的内部的晶片堆叠W可以放置在内侧门板上，晶片堆叠的顶部W被打开。 当门从水平位置升高到垂直位置时，晶片堆叠W通过隔板中的开口旋转，使得晶片堆叠W现在处于工艺侧。 晶片映射器具有连接到门或在门内的可移动手推车。 手推车可以在步进电机的控制下平行移动到晶片堆叠W，并检查堆叠的每一排，对晶片进行计数，因为光从晶片的边缘反射或散射。 每个晶片可以通过盖板中的窗口进行光学探测，并且可以绘制特征信号以提供具有晶片位置的后续晶片制造操作。 与台车相对的一侧的可移动气刀磁力地联接到手推车并与手推车一起移动，以便从工艺环境中清除液滴的窗口。 当负载端口接口将处理环境中的盒和晶片堆叠W定位时，液滴的精细喷射可以围绕晶片堆栈W引导。