公开(公告)号：US06494666B2

公开(公告)日：2002-12-17

申请号：US09771159

申请日：2001-01-26

申请人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

发明人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

IPC分类号： B66C2300

CPC分类号： B25J18/04 ,  B25J9/042 ,  B25J19/0079 ,  H01L21/67739

摘要： A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

摘要翻译： 适于运输半导体晶片的三自由度SCARA臂包括在臂的远端接头处的端部执行器组件。 在一种配置中，末端执行器将工件翻转过来。 臂包括具有突出在基部之上的开放柱组件的支撑柱。 在组件内，Z轴驱动器对由支撑柱承载的中空管的延伸和缩回起动作用。 绕Z轴可旋转并且具有远离支撑柱底部的远端的轴接收臂组件。 手臂组件旋转驱动器激励轴的旋转。 固定到轴的远端的臂基板从其支撑臂组件。 臂基板带有从Z轴移位的腕关节，并且接收通过末端执行器旋转驱动来使围绕腕关节轴旋转的末端执行器。

公开(公告)号：US07695239B2

公开(公告)日：2010-04-13

申请号：US10891406

申请日：2004-07-14

申请人： Kung Chris Wu

发明人： Kung Chris Wu

IPC分类号： H01L21/68

CPC分类号： H01L21/67766 ,  B25J15/0028 ,  Y10S414/136 ,  Y10S414/138 ,  Y10S414/141

摘要： The present invention is a pod opener having an end effector which: a. grips and releases a reticle supported above the base of a pod; and b. while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, reorients the reticle. In one embodiment, the pod opener reorients the reticle by rotating it about a single axis disposed substantially perpendicular to its patterned surface. In another embodiment, the present invention is a pod opener which while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, in addition to effecting rotation substantially perpendicular to a reticle's patterned surface, also turns the reticle over so a patterned surface of the reticle is oriented for proper focus within the IC photolithography tool.

摘要翻译： 本发明是一种具有端部执行器的开启器，其具有：a。 抓住并释放在荚的基部上方支撑的掩模版; 和b。 同时将掩模版传送到荚的基部和相邻的IC光刻工具之间，重新定向光罩。 在一个实施例中，通过围绕基本上垂直于其图案化表面设置的单个轴线旋转掩模开启器来重新定向光罩。 在另一个实施例中，本发明是一种荚果开启器，其在将光罩传送到荚的基部和相邻的IC光刻工具之间，除了实现基本上垂直于掩模版图案的表面的旋转之外，还将掩模版转过图案 掩模版的表面被定向成在IC光刻工具内进行适当的聚焦。

公开(公告)号：US20130043776A1

公开(公告)日：2013-02-21

申请号：US13695286

申请日：2011-05-02

申请人： Kung Chris Wu

发明人： Kung Chris Wu

IPC分类号： A47B81/00

CPC分类号： G03F1/66

摘要： A two stage opener (50) for an EUV RSP (32, 34) includes an outer RSP pod opener (42, 44) having: 1. a RSP latch mechanism (42rlm) for latching a sealed outer RSP pod (32, 34) in place on the RSP pod opener (42, 44) and 2. a RSP lock/unlock mechanism (42lulm) for unlocking the RSP pod (32, 34) so the RSP pod opener (42, 44) can separate a RSP pod cover (32c, 343c) from a RSP pod door (32d, 34d). After the RSP lock/unlock mechanism (42lulm) unlocks the RSP pod (32,34), the RSP pod opener (42, 44) separates the RSP pod door (32d, 34d) from the RSP pod cover (32c, 34c) thereby exposing a metal case (20). The pod opener (50) also includes a metal case opener (52) having at least two (2) arms (56) for receiving and supporting the metal case cover (22) while the two stage pod opener (50) separates the metal case base (24) from the metal case cover (22) thereby exposing the hare reticle (26) carried on the metal case base (24).

摘要翻译： 用于EUV RSP（32,34）的两级开启器（50）包括外部RSP开启器（42,44），其具有：1.用于锁定密封的外部RSP盒（32,34）的RSP闩锁机构（42rlm） 在RSP开启器（42,44）上的适当位置和2.用于解锁RSP盒（32,34）的RSP锁定/解锁机构（42lul），使得RSP盒开启器（42,44）可以分离RSP盒盖 （32c，343c）从RSP荚门（32d，34d）移动。 在RSP锁定/解锁机构（42lulm）解锁RSP舱（32,34）之后，RSP舱盖开启器（42,44）将RSP舱门（32d，34d）与RSP舱盖（32c，34c）分开，从而 露出金属外壳（20）。 开箱器（50）还包括具有至少两个（2）臂（56）的金属开启器（52），用于接收和支撑金属外壳盖（22），同时两台开箱器（50）将金属外壳 （22）的底座（24），从而露出承载在金属外壳基座（24）上的野兔标线（26）。

公开(公告)号：US06655423B2

公开(公告)日：2003-12-02

申请号：US10234474

申请日：2002-09-05

申请人： John Rush ,  Chawshiang Wu ,  Torben J. Ulander ,  Kung Chris Wu

发明人： John Rush ,  Chawshiang Wu ,  Torben J. Ulander ,  Kung Chris Wu

IPC分类号： B65B104

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/137

摘要： A front-opening unified pod quick-opening apparatus. The apparatus is positioned in a front-opening unified pod loading system. The apparatus has a rail, a slide, a short linking rod having a first end rotatably fixed on the slide to drive the slide to move along the rail, a long rocker arm having a first end rotatably fixed on a second end of the short linking rod, and a second end rotatably fixed on a pin on the backboard; and a power source. When the power source drives the long rocker arm to rotate upwards around the pin on the backboard, the long rocker arm leads the short linking rod, and the short linking rod drives the slide to move upwards along the rail which results in an upward rectilinear motion, and vice versa.

摘要翻译： 前开口统一荚快开机。 该装置位于前开口统一的荚装载系统中。 该装置具有导轨，滑块，短连杆，其具有可旋转地固定在滑块上的第一端，以驱动滑块沿着轨道移动;长摇臂，其具有可旋转地固定在短连接的第二端上的第一端 杆和可旋转地固定在背板上的销上的第二端; 和电源。 当电源驱动长摇臂向上围绕背板上的销向上旋转时，长的摇臂通过短的连接杆引导，短的连接杆驱动滑块沿轨道向上移动，导致向上的直线运动 ，反之亦然。

公开(公告)号：US06616034B2

公开(公告)日：2003-09-09

申请号：US10007106

申请日：2001-12-10

申请人： Kung Chris Wu ,  Chen Wu ,  Chien-Rong Huang ,  Jui-Hung Hsu

发明人： Kung Chris Wu ,  Chen Wu ,  Chien-Rong Huang ,  Jui-Hung Hsu

IPC分类号： G06F1700

CPC分类号： G07F7/1008 ,  G06K2017/0045 ,  G06Q20/346

摘要： An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

摘要翻译： 一种用于在制造设施内跟踪晶片载体的识别系统。 该系统使用智能卡技术，其中在每个晶片载体上放置识别卡。 智能卡具有用于存储关于晶片载体的信息的存储器。 电力与数据一起传输到卡，以便智能卡不需要单独的电源。 用于与智能卡通信的设备可以是静止的，或者它们可以是便携式手持设备。 网络将读卡器连接到中央数据库。

公开(公告)号：US20130108409A1

公开(公告)日：2013-05-02

申请号：US13807920

申请日：2011-07-05

申请人： Kung Chris Wu ,  Jing Wen ,  Ruiqiu Yang ,  Junqiang Zheng

发明人： Kung Chris Wu ,  Jing Wen ,  Ruiqiu Yang ,  Junqiang Zheng

IPC分类号： B25J15/06

CPC分类号： B25J15/0616 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/6838

摘要： An end effector (20, 20′) for simultaneously transferring a batch of substrates (202). The end effector (20, 20′) includes a set of juxtaposed substrate grippers (22, 22′) having a pitch between pairs of grippers (22, 22″) that does not exceed six (6.00) mm. Each gripper (22, 22′) has a contact surface (54, 54′) against which a substrate (202) becomes clamped upon injecting a gaseous jet into an open groove (56A, 56B, 56′) formed into the contact surface (54, 54′). Due to the close spacing between immediately adjacent pairs of substrate grippers (22, 22′), the open groove (56A, 56B, 56′) must be very shallow. The open groove (56A, 56B, 56′) can be characterized by having a groove depth into the contact surface (54, 54′) that is between two (2 .00) mm and two and four tenths (2.40) mm. Alternatively, the open groove (56A, 56B, 56′) can be characterized by having a groove width at the contact surface (54, 54′) that is at least three (3) times larger than a groove depth into the contact surface of the substrate gripper.

摘要翻译： 用于同时传送一批衬底（202）的端部执行器（20,20'）。 末端执行器（20,20'）包括一组并列的基板夹持器（22,22'），其具有不超过六（6.00）mm的夹持器对（22,22“）之间的间距。 每个夹持器（22,22'）具有接触表面（54,54'），当将气体射流注入形成到接触表面的开口槽（56A，56B，56'）中时，衬底（202）被夹紧 54,54'）。 由于立即相邻的基板夹持器对（22,22'）之间的紧密间隔，开口槽（56A，56B，56'）必须非常浅。 开口槽（56A，56B，56'）的特征在于具有在两个（2 .00）mm和两个和四分之一（2.40）mm之间的接触表面（54,54'）中的凹槽深度。 或者，开槽（56A，56B，56'）的特征在于，在接触表面（54,54'）处具有凹槽宽度，该槽宽度大于进入接触表面的凹槽深度的至少三（3）倍 基板夹具。

公开(公告)号：US07318697B2

公开(公告)日：2008-01-15

申请号：US10506861

申请日：2003-06-12

申请人： Kung Chris Wu ,  Robert Frank Sifuentes ,  Kenneth Alan Hardy ,  Edgardo A. Caliboso ,  Anatoly Malobrodsky ,  Chien-Rong Huang

发明人： Kung Chris Wu ,  Robert Frank Sifuentes ,  Kenneth Alan Hardy ,  Edgardo A. Caliboso ,  Anatoly Malobrodsky ,  Chien-Rong Huang

IPC分类号： H01J5/02

CPC分类号： H01L21/6734 ,  H01L21/67359 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/6831 ,  H01L21/68707

摘要： A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).

摘要翻译： 专门适应的SMIF盒（20）接收并保持从其数十种不同配置中选择的一种特定类型的标线盒（36）或标线架支架（132）。 可以询问SMIF盒（20）以确定其中承载的标线盒（36）或标线架（132）的特定类型。 标线片传送系统（50）接收一对这样的SMIF盒（20），询问每个SMIF盒（20）以确定SMIF盒（20）携带的哪种类型的标线盒（36）或标线架（132） 并且自动将标线片（42）通过受控的环境从一个标线盒（36）或标线保持器（32）移动到另一个标线盒（36）或标线架支架（132）。 可在系统（50）中包括的标线重新定向器（56）还允许自动交换标线片载体（144）和标线片盒（36）或标线架支架（132）之间的标线（42）。

公开(公告)号：US06932558B2

公开(公告)日：2005-08-23

申请号：US10190111

申请日：2002-07-03

申请人： Kung Chris Wu

发明人： Kung Chris Wu

IPC分类号： H01L21/68 ,  B65G29/00 ,  B65G49/07

CPC分类号： H01L21/68 ,  Y10S414/136

摘要： A prealigner for aligning a disk-like work piece such as a silicon wafer, by centering and rotationally orienting the work piece. The prealigner centers and orients the work piece while only touching the periphery of the work piece using a plurality of wafer rollers and an air bearing table to support the weight of the wafer. The prealigner can accept a range of different diameters of work piece without modification because the wafer rollers are radially moveable until they contact and center the work piece. The prealigner includes a plurality of simple optical sensors for detecting a notch in the work piece and the work piece is rotationally oriented based on a notch detection signal from the optical sensors.

摘要翻译： 用于通过对准和旋转地定向工件来对准诸如硅晶片的盘状工件的预对准器。 预对准器中心并定位工件，同时仅使用多个晶片辊和空气支承台来接触工件的周边，以支撑晶片的重量。 预制动器可以接受一系列不同直径的工件而无需修改，因为晶片滚筒可以径向移动，直到它们接触并使工件居中。 预对准器包括多个用于检测工件中的凹口的简单光学传感器，并且工件基于来自光学传感器的切口检测信号旋转定向。

公开(公告)号：US06698992B2

公开(公告)日：2004-03-02

申请号：US10234513

申请日：2002-09-05

申请人： Kung Chris Wu ,  Torben J. Ulander ,  Chawshiang Wu ,  John Rush

发明人： Kung Chris Wu ,  Torben J. Ulander ,  Chawshiang Wu ,  John Rush

IPC分类号： B65F302

CPC分类号： H01L21/67775 ,  H01L21/68 ,  Y10S414/139

摘要： An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input hole opened at another end, and at least one radial distributing hole equally opened at its circular surface; a ring-shaped inflatable body made from an expandable elastic material; a supporting ring encircled around the central bolt and positioned above the distributing hole, for supporting the inflatable body, the supporting ring having at least one radial inflating hole equally positioned corresponding to the radial distributing hole of the central bolt; and an input fluid source connected to the axial input hole of the central bolt, for providing an input fluid.

摘要翻译： 公开了一种用于定位统一舱盖的可弹性扩张的定位装置，其具有中心紧固件，该中心紧固件具有在接口板上突出的一端和在另一端开口的轴向输入孔，以及在其上同等开口的至少一个径向分配孔 圆形表面 由可膨胀弹性材料制成的环形可充气体; 围绕中心螺栓环绕并位于分配孔上方的支撑环，用于支撑可充气体，支撑环具有至少一个相应于中心螺栓的径向分布孔等同定位的径向充气孔; 以及连接到中心螺栓的轴向输入孔的输入流体源，用于提供输入流体。

公开(公告)号：US5758025A

公开(公告)日：1998-05-26

申请号：US461637

申请日：1995-06-05

申请人： Kung Chris Wu

发明人： Kung Chris Wu

IPC分类号： G06N7/02 ,  G06F15/18

CPC分类号： G06N7/023 ,  Y10S706/90

摘要： A fuzzy logic controller that is dynamically adaptive to varying operating conditions. The controller remaps the intervals of the membership functions between a normalized universe of discourse and the real axis by use of an input fuzzy gain and an output fuzzy gain. The membership functions are also remapped within the universe of discourse through the use of a sensitivity index. Remapping of the membership functions allows the sensitivity of the controller to be adapted to optimize the controller's performance in changing operating conditions. This allows a robust controller to be implemented at low computational expense.

摘要翻译： 一种模糊逻辑控制器，可动态适应不同的运行条件。 控制器通过使用输入模糊增益和输出模糊增益，重新映射归一化的话语区域与实轴之间的隶属函数的间隔。 通过使用灵敏度指数，会话功能也在话语范围内重新映射。 会员功能的重新映射允许控制器的灵敏度适应于在改变操作条件时优化控制器的性能。 这允许在低计算费用下实现鲁棒的控制器。